Bertrand Ardouin Thomas Zimmer

1. XMOD Technologies: Hicum toolkit & extraction services Bertrand Ardouin Thomas Zimmer HICUM Workshop, September 2002, Monterey

2. OUTLINE • XMOD: Presentation • How to choose a compact model ? • Measurement, Extraction, Modelling Services and Consulting • Hicum “Aperitif toolkit” Simple approach HICUM Workshop, September 2002, Monterey

3. XMOD is here Where ? Laboratoire de Microélectronique IXL HICUM Workshop, September 2002, Monterey

4. What ? • A Start-up company in the Bipolar modelling domain : • Offering parameter extraction software • Provide extraction and modelling services (parameter extraction, on wafer measurements, …) • Hicum (SGP and VBIC models also supported) • Single transistor and scaling approach • Custom models for specific applications (HDL-A) • Co-operation and support from : • Technical University Dresden • University Bordeaux HICUM Workshop, September 2002, Monterey

5. What ? On wafer measurement capabilities NWA HP 8510C (HF, CV) HP 4155B (DC) C-V meter HP 4284 (C-V) T controler -60 °C up to 200 °C Semi-automatic prober Karl Suss PA200 HICUM Workshop, September 2002, Monterey

6. What ? The “Hicum Aperitif Toolkit” Single transistor methodology “In House” ICCAP tools for complete parameter extraction HICUM Workshop, September 2002, Monterey

7. Gummel-Poon VBIC Mextram Hicum Simplicity: Time requirement= save money Why ? Efficiency: ability to model complex technologies HICUM Workshop, September 2002, Monterey

8. Gummel-Poon VBIC Mextram Hicum Simplicity: Time requirement= save money Why ? Scalability not taken into account Single transistor strategy Efficiency: ability to model complex technologies HICUM Workshop, September 2002, Monterey

9. Why ? • There’s a need for companies in this domain: • Help to accelerate the FIRST use of Hicum and help to establish a wide use • Provide complete extraction services for companies having no experience in the bipolar domain (SiGe and III-V HBT’s) • Provide consulting for modelling of very High frequency devices, need of scaling, ... Centralise Bipolar experience HICUM Workshop, September 2002, Monterey

10. Gummel-Poon Hicum Switch Goals of the “Hicum Aperitif Toolkit” ? • Learn a new model and new tools • Scaling approach can be complex • New test structures on the wafers HICUM Workshop, September 2002, Monterey

11. Gummel-Poon Hicum Switch Simplified approach Decouple Scaling from parameter extraction No specific test structures Goals of the “Hicum Aperitif Toolkit” “Hicum Aperitif Toolkit” allows to use the single transistor strategy (SGP like) HICUM Workshop, September 2002, Monterey

12. Evaluate the model without too much effort A smooth transition from SGP to Hicum Obtain efficient and physically meaningful parameter sets for Hicum(from direct extraction) Parameters extracted for the single transistor approach will be required for scaling (Transit time) Goals of the “Hicum Aperitif Toolkit” “Hicum Aperitif Toolkit” allows to: HICUM Workshop, September 2002, Monterey

13. Description of the toolkit ICCAPmeasurements toolkit Instruments Standard Bipolar Measurement Database Probes ICCAP Gummel-Poon, VBIC, MEXTRAM Hicum “Aperitif” Toolkit TRADICA and BIPAX HICUM Workshop, September 2002, Monterey

14. Description of the toolkit ICCAP « Hicum aperitif Toolkit » New GUI interface HICUM Workshop, September 2002, Monterey

15. Main window Import data Simply select directory Import Define Select mdm file + view header Description of the toolkit HICUM Workshop, September 2002, Monterey

16. Temperature Define things Comments on technology Description of the toolkit HICUM Workshop, September 2002, Monterey

17. Extract Extraction steps Parameter group Status Edit parameters Run Description of the toolkit HICUM Workshop, September 2002, Monterey

18. Export Results Utilities Export Directory Create HTML documentation Description of the toolkit HICUM Workshop, September 2002, Monterey

19. Get from plots Optimize Tune Description of the toolkit HICUM Workshop, September 2002, Monterey

20. Description of the toolkit HICUM Workshop, September 2002, Monterey

21. Description of the toolkit HICUM Workshop, September 2002, Monterey

22. Description of the toolkit HICUM Workshop, September 2002, Monterey

23. Description of the toolkit HICUM Workshop, September 2002, Monterey

24. Description of the toolkit HICUM Workshop, September 2002, Monterey

25. Parameter extraction: Results fT (Ic) b (Vce) BiCMOS SiGe 0.35 µm ST Microelectronics fT = 45 GHz HICUM Workshop, September 2002, Monterey

26. Parameter extraction: Results Ic (Vbe), Ib (Vbe) Ic (Vce) BiCMOS SiGe 0.35 µm ST Microelectronics fT = 45 GHz HICUM Workshop, September 2002, Monterey

27. Parameter extraction: Results g0 = d IC / dVce BiCMOS SiGe 0.35 µm ST Microelectronics fT = 45 GHz HICUM Workshop, September 2002, Monterey

28. Parameter extraction: Results fT (Ic) BiCMOS SiGe 0.25 µm ST Microelectronics fT = 75 GHz HICUM Workshop, September 2002, Monterey

29. Parameter extraction: Results BiCMOS SiGe 0.25 µm ST Microelectronics fT = 120 GHz HICUM Workshop, September 2002, Monterey

30. Conclusion • XMOD provides Software, Consulting and Services for Bipolar Modelling community • “Hicum Aperitif Toolkit” is ready for evaluation • Simplified approach allows to familiarise with the model and extend its interest • Scaling and statistics planed HICUM Workshop, September 2002, Monterey