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Probe Measurements. New Results. 1. DC+2RF Discharge 2. DC in mixtures 3. Additional dates for DC at different currents. l p =4 mm 32 m m. A. C. Gas Flow. 100 M . Probe 2. Probe Adapter. Probe 1. PK4 chamber. Slide. Magnet. 100 M . M1: “ U ”. 11.4 M . 2 M . PC.
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Probe Measurements. New Results 1. DC+2RF Discharge 2. DC in mixtures 3. Additional dates for DC at different currents
lp=4 mm 32mm A C Gas Flow 100 M Probe 2 Probe Adapter Probe 1 PK4 chamber Slide Magnet 100 M M1: “U” 11.4M 2 M PC M2: “I” 0.82 M 10.1 M PS Upl -60+150V Optical RS232 interface Optical RS232 interface
1. DC+2RF I1 I2 4cm 4cm 91MHz 80 MHz Z 0 cathode anode
Coil 11 k 50 50
2. DC discharge in mixtures • Ne + Xe 2; 5 % • Ne + O2 0.05; 0.15 %