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ASML XT14xx – ASML_OV_EX1

Weir PW. ASML XT14xx – ASML_OV_EX1. Dataset: Overlay & Registration Data Features: . TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@TEAsystems.com May 25,2007. Project Summary. Program : Weir PW Situation:

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ASML XT14xx – ASML_OV_EX1

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  1. Weir PW ASML XT14xx – ASML_OV_EX1 Dataset: Overlay & Registration Data Features: TEA Systems Corp. 65 Schlossburg St. Alburtis, PA 18011 610 682 4146 TZavecz@TEAsystems.com May 25,2007

  2. Project Summary • Program: Weir PW • Situation: • Import of AMAT NanoSEM 3D with multi-feature types. Vector Raptor import of ASML data

  3. ASML_OV_EX1_family Analysis of data by wafer

  4. Overall Data for 3 wafers Vector Raptor import of ASML data

  5. Wafer model • Wafer modeled values • This is a “Process Model” since we look for vector change as a function of position on the wafer rather than it’s grid location. Vector Raptor import of ASML data

  6. Wafer Response • “WaferResponse_Vector” workbook sheet showing residual & systematic variation Vector Raptor import of ASML data

  7. Modeled values for each wafer • WaferModel_Vector worksheet Vector Raptor import of ASML data

  8. Residuals to the wafer model Vector Raptor import of ASML data

  9. Wafer & Field Fitted response • Only first 5 terms of field model used • Validation is turned on • Model is fitted to each column of data • So no trap values Vector Raptor import of ASML data

  10. Field Response only • Fitted wafer contribution is not shown here • (above) X-offset by column location for 3 wafers Vector Raptor import of ASML data

  11. Offset +/- Std Error • Graph generated for each “family” • In this case for each wafer Vector Raptor import of ASML data

  12. Range of Field Fitted Response Vector Raptor import of ASML data

  13. ASML_OV_Ex1 May 2007

  14. ASML XT1400 Family Data • Overlay and Matching data • Note: • Data headings have been changed from the dz-H, dz-V names to the correct Xreg & Yreg nams • Please ignore and dz-h,v names on these graphs Vector Raptor import of ASML data

  15. Imported overlay • XY Overlay Data • Image Data is summarized on a data sheet • Four (4) data sheets are imported • Overlay Data • Excluded Data points • Registration #1 and • Registration #2 data Vector Raptor import of ASML data

  16. Excluded Data • 25 Data points were excluded • All were on the last field of wafer #3 Vector Raptor import of ASML data

  17. Registration & Overlay Data Registration 1 Registration 2 • Overlay = Reg2 – Reg1 Overlay Vector Raptor import of ASML data

  18. Raw Overlay Wafer #1 Yoverlay Xoverlay Vector Raptor import of ASML data

  19. Wafer #2 raw overlay Xoverlay Yoverlay Vector Raptor import of ASML data

  20. Precision Calculation • Precision of the Raw X,Y overlay data • X & Y registration have an average 2 nm precision (one sigma) • Most of the variation comes from InterField or Field-to-Field variation • i.e. “Stage-stepping precision” • Variation within a field is (0,3, 1.6) nm one sigma • Wafer to wafer variation is (0.3, 0.6) nm Vector Raptor import of ASML data

  21. Covariance Vector Raptor import of ASML data

  22. ASML Wafer Model Vector Raptor import of ASML data

  23. Column-base modeled overlay First 5 terms of the ASML model will be applied to each individual column of each field.

  24. Column model, offset only Vector Raptor import of ASML data

  25. Field-Column Model Response • FieldResponse_Column Vector Raptor import of ASML data

  26. Column Model Summary • Sheet Vector Raptor import of ASML data

  27. Modeled column offset Vector Raptor import of ASML data

  28. Column offset values • Field is next Collapsed into the vector results for a single field Vector Raptor import of ASML data

  29. Offset by column position Vector Raptor import of ASML data

  30. Xreg Column offset by wafer • This is X overlay data • The “dz-H” value shown here is wrong but the data is right • This has been changed Wafer 1 Wafer 2 Wafer 3 Vector Raptor import of ASML data

  31. ASML Row Model

  32. ASML Row Model Applied Vector Raptor import of ASML data

  33. Row Model Summary • Data sheet: “FieldModel_Row_Summary_Xyvec” • Only offset values shown • Summary of each model fit by row location on field Vector Raptor import of ASML data

  34. Row-model response • FieldResponse_Row_Xyvec Vector Raptor import of ASML data

  35. Row Magnification Change Vector Raptor import of ASML data

  36. Vector Raptor import of ASML data

  37. ASML Full Field Model

  38. Overall Response of Raw Data Vector Raptor import of ASML data

  39. Overall Model Response Vector Raptor import of ASML data

  40. Wafer (process) based response • Vectors are modeled by their location on the wafer • Does not use “grid” stepping location of scanner • Process-induced response of overlay or • Overall effect of wafer mag/rotation error. Vector Raptor import of ASML data

  41. Full-Field, selected components • Wafer & Field were modeled • Only the offset, mag & rotation were displayed • Fitted data is only for these 3 coefficients Vector Raptor import of ASML data

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