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同步輻射加速器應用

同步輻射加速器應用. 快速退火對樣品之影響 — 以 X-ray 繞射 (XRD) 與反射 (XRR) 分析 CoFeB/MgO/CoFeB 結構及介面特性. 指導教授　黃榮俊教授. 報告人　物理五 陳俊頴 C34931120. June 3 2009 in NCKU. 使用 XRD 分析晶相、晶格常數 使用 X-ray reflectivity(XRR) 分析介面粗糙度、膜厚 使用 TEM 觀察紋理及、粗糙度 退火溫度 : 無、 300 ˚C 、 400˚C 、 475˚C 、 500˚C 、 600˚C. 5nm. CoFeB. 5nm. MgO.

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同步輻射加速器應用

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  1. 同步輻射加速器應用 快速退火對樣品之影響— 以X-ray繞射(XRD)與反射(XRR)分析CoFeB/MgO/CoFeB結構及介面特性 指導教授　黃榮俊教授 報告人　物理五 陳俊頴 C34931120 June 3 2009 in NCKU

  2. 使用XRD分析晶相、晶格常數 • 使用X-ray reflectivity(XRR)分析介面粗糙度、膜厚 • 使用TEM觀察紋理及、粗糙度 • 退火溫度: 無、300 ˚C 、400˚C、 475˚C、 500˚C、 600˚C 5nm CoFeB 5nm MgO 5nm MgO CoFeB Si subtrate

  3. ＸＲＲ 膜厚、電子雲密度、粗糙度 • Program : Parrat32 • 方法:利用實驗之reflectivity參數及Buk電子雲密度與成長膜厚模擬結果fitting • electronic density of bulk : http://www.ncnr.nist.gov/resources/old_applets/sldcalc.html

  4. XRR、XRD所用光束線 • 使用BL17B1工作站 Optical layout of BL17B 8-Circle Diffractometer in BL17B1 Hutch http://www.nsrrc.org.tw/www/eng/endstation/17b3/saxs/

  5. Technical InformationTechnical information ofBL17B

  6. 參考文獻 • NSRRC Experimental Facility Division http://140.110.203.42/EFD.php?num=138 • BL17B3 Small-Angle X-ray Scattering for Nanostructures http://www.nsrrc.org.tw/www/eng/endstation/17b3/saxs/ • S. S. P. Parkin, C. Kaiser, A. Panchula, P. M. Rice, B. Hughes, M. Samant and S. H.Yang, Nature Materials 3, 862 (2004). • S. Ikeda, J. Hayakawa, Y. Ashizawa, Y. M. Lee, K. Miura, H. Hasegawa, M. Tsunoda, F. Matsukura, and H. Ohno, Applied Physics Letters, Vol. 93, pp. 082508, (2008) • 國立成功大學物理系許峻瑜博士論文

  7. 報告完畢 Thanks for your attention

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