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Institute of Electronic Materials Technology. Joint Laboratory for Characterisation of Defect Centres in Semi-Insulating Materials. Complex characterization of defect centres in neutron irradiated MCz silicon by PITS, photoluminescence and EPR methods.
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Institute of Electronic Materials Technology Joint Laboratory for Characterisation of Defect Centres in Semi-Insulating Materials Complex characterization of defect centres in neutron irradiated MCz siliconby PITS, photoluminescence and EPR methods Paweł Kamiński, Roman Kozłowski, Jarosław Żelazko, Barbara Surma, and Mariusz Pawłowski • Institute of Electronic Materials Technology, 133 Wólczyńska Str. 01-919 Warszawa, Poland Workshop on Defect Analysis in Radiation-Damaged Silicon Detectors, Vilnius, 2-3 June 2007
Outline • Samples • HRPITS images of spectral fringes for radiation defects in neutron MCz silicon – effect on the neutron fluence on the defect structure of as-irradiated material • Photoluminescence spectra • Results of EPR measurements • Conclusions
Samples Starting material: Okmetic MCz <100> silicon wafers, n-type, 1 kWcm, 300 mm thick [O] = 5.5x1017 cm-3 [C] = 2.5x1016 cm-3 Neutron irradiation: TRIGA reactor in Ljubljana, 1-MeV, fluences: 1x1012, 1x1013, 1x1014, 3x1014, 1x1015, 3x1015, 1x1016, and 3x1016 cm-2
HRPITS images (1) Laser: 650 nm, 5mW; UA= 3V;Gain: 1x106 V/A; Line width [samples]: 50000; Time Resolution [us]: 10 Period [ms]: 505; Average: 150; Illumination pulse width: 50 ms
Effect of neutron fluence on the concentration midgap centres and Fermi level position Effect of fluence on the Fermi level position determined from temperature dependence of dark current (TDDC) Effect of fluence on the concentration of midgap centres
Acknowledgement The authors want to thank Prof. Gunnar Lindstroem for his effort put into the coordination of research within the framework of the WODEAN project. We would like also to thank Gregor Kramberger for performing the neutron irradiations. This work was carried out within the framework of the RD 50 project with financial support of the Polish Ministry of Science and Higher Education under grant No. CERN/15/2007.