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Spin coater (LAMDA-P)

Spin coater (LAMDA-P). What is the spin coating?. Spin coating is a procedure used to deposit uniform thin films to flat substrates . Usually a small amount of coating material is applied on the center of the substrate, which is either spinning at low speed or not spinning at all.

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Spin coater (LAMDA-P)

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  1. Spin coater (LAMDA-P)

  2. What is the spin coating? • Spin coating is a procedure used to deposit uniform thin films to flat substrates. • Usually a small amount of coating material is applied on the center of the substrate, which is either spinning at low speed or not spinning at all. • The substrate is then rotated at high speed in order to spread the coating material by centrifugal force. • A machine is called a spin coater, or simply spinner.

  3. Specifications (ACE-200)

  4. Specifications (Rocker 300)

  5. Installationprocedure 1. Connect spin coater power cord, vacuum hose and vacuum pump power cord on the back of the body.

  6. Installationprocedure cont. 2. Press main power switch “ON” at the back of the body. 3. Insert vacuum chuck to shift groove.

  7. Button function • : Selection button of program menu • : Equipment operation • : Equipment stop • : Vacuum (sample fixation), delete cell (data) of program • : When entering (setting) the step (in the page) data, cursor • position movement • : Memory initialization, delete line of step and program respectively • : Step (line) addition

  8. Button function cont. • : Store information after entering step and program numbers, change program entering screen • : Change step entering screen page, switch between graph and character screen • ~ : Enter each number • : Spin coater power • : Vacuum pump power • : Sensor of controlling vacuum degree

  9. Program input procedure 1. Move to coding program with pressing button in initial screen. Then locate cursor (“_”) at “1. Coding program” and press button. 2. After inserting program number in select program “[ ]”, press button.

  10. Program input procedure cont. 3. After inserting data of rpm, ramp and time with respect step, move to next cell (line) by using button.

  11. Program input procedure cont. 4. After entering values at respect steps, press button. (Then entered values are stored and character screen is changed to graphic screen.)

  12. Program input procedure cont. 5. Equipment operation screen can be switch graph or character screen to use buttons.

  13. Instruction (how to use) 1. Prepare sample and coating solution. 2. After putting on the sample on the chuck, match the center of both. 3. Press button to fix the sample, after pressing button. If vacuum condition is stable, “VACUUM” lamp is on. 4. If previous steps are finished, start coating process with pressing button (“START” lamp is on) after inserting coating solution on the sample and closing by using cover cap.

  14. Instruction (how to use) cont. • 5. If completing coating process, “START” lamp is off. Then take out the sample after removing vacuum with pressing button. • 6. Alarm function • 6-1. If vacuum condition is not reached stable point, alarm lamp blink slowly. • After recovering stable vacuum condition, run with pressing button. • 6-1. If motor is overloaded, alarm lamp blink quickly. • Turning off and waiting for 10 sec, then restart.

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