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Outline

Outline. Parylene Properties Deposition of Parylene Parylene Etching. Parylene-F. Parylene-D. Parylene-N. Parylene-C. Properties of Parylene. Parylene, a white granular powder, is a generic name for a class of polymers called Poly-Para-Xylylene.

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Outline

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  1. Outline • Parylene Properties • Deposition of Parylene • Parylene Etching

  2. Parylene-F Parylene-D Parylene-N Parylene-C Properties of Parylene • Parylene, a white granular powder, is a generic name for a class of polymers called Poly-Para-Xylylene. • Parylene material was discovered by M. M. Swarc in 1947 and it was commercialized by W. F. Gorham in 1965. • Based on how the aromatic or aliphatic hydrogen atoms are replaced with other atoms or chemical groups, parylene is classified into 20 types • However, only 4 of them are widely in parylene N, C, D and F

  3. Properties of Parylene • Parylene does not produce any out-gassing, and has low permeability to moisture and gases. • Deposited at room temperature • Compatible with silicon micromachining • As deposited it is hydrophobic (water contact angle of ~98) • But can be made hydrophilic with a short plasma treatment (ca ~ 10 ) • It has high tensile strength (10,000psi) and high mechanical strength (Young’s modulus of 400Kpsi)

  4. Parylene Deposition Three stage vapor deposition process PDS 2010

  5. Parylene Deposition Dep. Rate=0.5um/gram Deposition rate of parylene C

  6. Parylene Etching - Low Temperature, low pressure and High Aspect Ratio (HAR) Parylene etching using Inductively Coupled Plasma (ICP) is developed - High Aspect Ratio > 8:1 • - Etching Recipes

  7. B A Scanning Electron Micrographs of etched Parylene structures Anisotropic profiles of (a) 55 µm and (b) 10 µm thick parylene

  8. Scanning Electron Micrographs of etched Parylene structures

  9. Scanning Electron Micrographs of etched Parylene structures

  10. Thank you

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