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真空壁处理

真空壁处理. 1 、白天放电 2 、夜晚 He 辉光 3 小时( 23:00-2:00 ) 3 、加强内衬烘烤,由 20A 升至 50A ( 22 : 00-6 : 00 ). 2 月 22 日早晨七点质谱. 真空度 P 内 =1.4E-5P ,壁温 =~100 度,辉光 3 小时. 2 月 23 日早晨七点的质谱. 真空度 P 内 =1.5E-5P ,壁温 =~110 度,辉光 3 小时. 当前真空状态 8:00. 内真空 :1.1E-5 Pa 外真空 :2.7E-4 Pa 壁温 ( 内衬 ):~110 度.

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真空壁处理

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  1. 真空壁处理 1、白天放电 2、夜晚He辉光3小时( 23:00-2:00) 3、加强内衬烘烤,由20A升至50A (22:00-6:00)

  2. 2月22日早晨七点质谱 真空度P内=1.4E-5P,壁温=~100度,辉光3小时

  3. 2月23日早晨七点的质谱 真空度P内=1.5E-5P,壁温=~110度,辉光3小时

  4. 当前真空状态8:00 • 内真空:1.1E-5 Pa • 外真空:2.7E-4 Pa • 壁温(内衬):~110度

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