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Sub-línies

Activitats en Nanotecnologies Grup de Dispositius, Sensors i Disseny VLSI Eduard Llobet Lluís F. Marsal. Sub-línies. MINOS : Microsystems and Nanotechnologies for Chemical Analysis (4 permanent, 2 RC, 1 JC, 9 PhD students) Nanosized metal oxide films for gas sensors CNT based gas sensors

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Sub-línies

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  1. Activitats en NanotecnologiesGrup de Dispositius, Sensors i Disseny VLSIEduard LlobetLluís F. Marsal

  2. Sub-línies • MINOS: Microsystems and Nanotechnologies for Chemical Analysis(4 permanent, 2 RC, 1 JC, 9 PhD students) • Nanosized metal oxide films for gas sensors • CNT based gas sensors • Porous alumina as template material • NEPHOS: Nano Electronic and Photonic Systems ( 4 permanent, 1 RC, 1 JC, 8 PhD students) • Modeling of nanoscale MOSFETs • Porous and macroporous silicon • Photonic crystals

  3. Projectes • Desarrollo de tecnología para células solares fotovoltaicasTIC2002-4184-C02-02, 2003-2005 • SINANO E04003S • EUROSOI E04002S • Food Quality and Safety with Microsystems, GoodFood FP6-IST-1-508774-IP, 2003-2006 • Técnicas y tecnologías para el desarrollo de microsistemas analizadores de gases basados en agrupaciones integradas de sensores catalíticos TIC2003-06301, 2004-2006

  4. 20 T=70 mK VDS=2 mV 15 10 Transconductance (S) 5 0 0.2 0.4 0.6 0.8 1 1.2 1.4 Modeling of nanoscale MOSFETs • We have developed a physics-based compact model for ballistic nanoscale GAA MOSFETs which is based on Landauer’s transmission theory and incorporates the effects of multi-subband conduction. • Scattering has been later incorporated to this model when used for DG MOSFETs. • A compact model for Surrounding Gate MOSFETs under the drift-diffusion approximation has also been developed. Cylindrical GAA with a 65 nm diameter Si film Dotted line: measurements Solid line: model

  5. Porous-macroporous silicon Macropores with modulated pore diameter in depth Silicon dioxide pillar arrays Silicon Oxide Microneedles

  6. Photonic crystals Photonic band structure of air holes in silicon.

  7. Nanosized metal oxide films for gas sensors • Ultra-thin films of metal oxides are grown by sputtering with interruptions. No interr. 1 interr. 3 interr. • As grain size diminishes, gas sensitivity increases.

  8. CNT based gas sensors MWNT functionalised in an RF inductively coupled oxygen plasma Pure MWNT Characteristics: • Catalytic carbon deposition method • Purity > 95% • Diameter: • MWNT: 3 to 25 nm (outer diam.) • Length: • up to 50 m MWNT+WO3

  9. CNT based gas sensors Response to NO2 of a pure MWNT sensor (functionalised with 20% at. oxygen at the surface) Response to NH3 of a WO3+MWNT sensor (functionalised with 10% at. oxygen at the surface)

  10. Porous alumina as template material Cu nanowires electroplated using a nanoporous alumina template Anodization of Al foils

  11. Publicacions rellevants • Modeling of Nanoscale Gate-All-Around MOSFETs, IEEE Electron Device Letters, 2004 • Analysis of photonic band gaps in two-dimensional photonic crystals with rods covered by a thin interfacial layer, Phys. Rev.B, 2004 • Continuous analytic current-voltage model for surrounding gate MOSFETs, IEEE Electron Device Letters, 2004 • Effects of symmetry reduction in two-dimensional square and triangular lattices, Phys. Rev.B, 2004 • Detection of NO2 and NH3 with Oxygen Functionalised MWNT-based -hotplate gas sensors, Eurosensors XVIII, 2004 and submitted to Sensors Actuators B. • New Technology of Metal Oxide Thin Film Preparation for Chemical Sensor Application, presented at E-MRS 2004 and submitted to Sensors Actuators B.

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