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2. 4/30/2010 Iowa State University EE492 – Senior Design II IRP Review:A TEST CHIP FOR ELECTROMIGRATION STUDIESKarl Peterson (EE), Emmanuel Owusu (CprE), and Joshua Ellis (EE)

3. Our project is special… • International collaboration • Product conceptualization & specification in addition to design • Integrated circuit (IC) rather than system design • Research-orientated objectives

4. Problem Statement • Design a test chip to support ISU research on electromigration & IC reliability • The chip must include test structures composed of actual metal interconnects in a modern silicon process • Must be capable of interfacing with a controller to allow electrothermal conditions in the chip to be varied and monitored.

5. The Big Picture • Electromigration – a complex physical phenomena that causes mechanical stress in metal interconnects • Important failure mechanism in ICs • Strong, non-linear dependence on current-density and temperature • Need models for electromigration that predict reliability under practical conditions Electromigration in progress!

6. Electromigration testing • Subject interconnects to variable electrothermal stresses • Measure time-to-failure of many samples • Analyze statistics, develop models, fit data, etc. • Use accelerated lifetime technique • Very high temperatures and current densities!

7. Proposed Solution • Proposed IC contains 8 identical metal test structures • Current-steering Digital-to-Analog Converter provides 0-25mA to test structure • On-die analog temperature sensing circuits • Open-circuit detection • Control logic with serial interface • Process technology:0.18 µm standard CMOS

8. System Diagram

9. Test Structure • Single-layer metal interconnect with serpentine pattern

10. Test structure – detail Corners reinforced to mitigate current crowding

11. Current-Steering DAC • Current range of 0 to 25 mA • 7 bit resolution • LSB Current – 200 µA • Current-Steering Architecture • Binary-weighted sources • Constant power • Open Circuit Detection • Two inverters on the output 0010110 DAC

12. Current-Steering DAC

13. Temperature sensor • Compact, CMOS-based sensor design • 5 sensor distributed throughout the floor plan

14. Control Logic • Serial interface • Simple protocol • Low pin-count

15. Digital flow • Needed standard cell library for synthesis • Free, scalable library did not meet design rules of our process • Extensive work to customize , re-verify standard cells

16. Auxiliary blocks • Master current switch • Reference-distribution network

17. Physical Design • Floorplan symmetry to prevent uncontrolled experimental variables • Significant redundancy and reinforcement of non-test blocks for reliability • Final design is 860 µm x 860 µm

18. Top-Level Layout

19. Simulations & Verification • Analog verification: relevant performance parameters for each block tested over full PVT range with 500-run statistical simulations • Digital verification: functional simulations, timing analysis • System-level, mixed-signal verification: several long transient simulations covering typical operation sequence

20. Top-level Functional Simulation #1 VDD rises #2 Reference current starts #3 <000> written to address reg. #4 <0101010> written to address reg. #5 master current switch enabled #6 test current settles at predicted value

21. Questions? Comments?

22. Backup slides – test results • DAC • Temperature sensor • Top-level functional

23. DAC Simulation Results

24. Temperature sensor – supply sensitivity, nominal design

25. Temperature Sensor – Stat. Sim.