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CERTIFIED CLEAN ROOM

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CERTIFIED CLEAN ROOM

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    1. CERTIFIED CLEAN ROOM Particle Measuring Technique Co.,Ltd.

    2. Organizational Chart

    3. Standard Clean Room Federal Standard 209E ( FS – 209E ) ISO Standard ( ISO 14644 – 1 )

    4. Federal Standard 209E (FS-209E)

    5. ISO Standard ( ISO 14644 – 1 )

    6. Test Description Airborne Particle Count Test Airflow Velocity Test Under Temperature Test Relative Humidity Test Room Pressurization Test Scan Leak Test Light Intensity Level Test Sound Pressure Level Test Airflow Parallelism Test Flooring Resistance Test Flooring Vibration Test Wall Conductivity Test

    7. Type of Condition AS BUILT The condition where the installation is complete with all services connected and functioning but with no production equipment, materials, or personnel present AT REST The condition where the installation is complete with equipment installed and operating in a manner agreed between the customer and supplier, but with no personnel present OPERATIONAL The condition where the installation is functioning in the specified manner, with the specified number of personnel present and working in the manner agreed upon

    8. Certify Clean room Testing

    9. Clean room Mobile Sampling

    10. Airborne Particle Test

    11. Airflow Velocity Test

    12. Temperature & Relative Humidity Test

    13. Room Pressurization Test

    14. Scan Leak Test

    15. Instrument

    16. Summary Of Acceptance Criteria

    17. Reference Customer 2007 Leader Industrial NMB Compart ISCM Belton Nidec Casio Johnson & Johnson WD Epson Toyocom Seksun Technology

    18. Test Procedures

    19. Procedure For HEPA Filter Installation Leak Test Purpose : To verify the absence of bypass leakage (between filter frame and ceiling grid system) in the installation of the filters and confirm that the installed filters are free of defects and small leaks. Instrumentation and Equipment PMS Lasair II / 310A counter Airdata Electronics Micromanometer, AMD-870 Specification Test Condition: At Rest Note: No additional aerosol challenge will be introduced to the upstream of the filters being tested. Not More than 1 particle at size 0.3 micron and greater must be detected in the downstream of the filter systems For each filter, any repair surface must not constitute more than 0.5 sq.inch. Procedure Reference : IEST Recommended Practice, IEST-RP-CC001.3 HEPA and ULPA Filters IEST Recommended Practice, IEST-RP-CC006.3 Testing Cleanrooms NEBB Procedural Standard for Certified Testing Of Cleanroom The filter’s face velocities were determined to ensure that they were within the general design range. The upstream concentration was taken at 0.3 micron and greater. This was taken for information only. Laser Particle Counter with a resolution of 0.3 micron was use for the leak test. The sampling flow rate of the counter was 1 ft3/min. Rectangular particle counter probe was use to scan the filters. The probe dimension was selected to achieve iso-kinetic sampling. The scanning rate used was in accordance to the above reference. The probe was held at 1” from the frame at filter surface during scanning. A count of 1 or more will force a sustained residence time of the probe at the location to assess the source of the detected counts. All confirmed or suspected leaks were identified and recorded. Re-test were conducted after remedial action had been taken When filter are beyond repair and replacement was made, record was made to reflect the replacement.

    20. Procedure For Airborne Particle Count

    21. Procedure For Temperature & Relative Humidity Test

    22. Procedure For Airflow Velocity Test

    23. Procedure For Room Pressurization Test

    24. Procedure For Light Intensity Level Test

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