Very Basic Tutorial on CoventorWare

1. Very Basic Tutorial on CoventorWare • Today’s Demos • Create simple 3D structure from process and layout • Meshing 3D model • Run MirrorDesign demo in Coventor

2. Configure Working Space of Coventor • Set Environmental Variables (Temp and TMP) (Both to C:\Temp) • Configure CoventorWare (Tools\User setting parameters) • Work Directory: D:\Design_Files • Scratch Directory: C:\Temp\coventor\”USERNAME”\ • Shared Directory: D:\Design_Files\Shared • License Server: @128.227.56.90

3. Knowing CoventorWare What can it do? • Lumped Modeling • Schematic • System Design • Structure Design • FEA, BEA, Verification

4. Creating 3D Structure • Points: • Draw in 2D (layout), thing in 3D (from processes flow) • Normally from bottom to top. Instance Home work 4.6 from Senturia’s textbook.

5. SCF: Sidewall Conformality Factor Creating 3D Structure • Use default material library Deposition Types of etch?

6. Creating 3D structure Negative Mask Need Boolean algorithm to generate ‘ring’ Try with other deposition and etching settings in process designer

7. Mirror Design Demo • Structure creation • Meshing • Eletrostatic, Mechanical, Co-Analysis

8. Mirror Design Demo