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Addon RF Oxygen Plasma Soure In-situ Omicron STM/AFM kSA 400 RHEED

Experimental Facilities. Riber 32P MBE system. Substrate Pretreatment System. Atomic Scale Step. Etching and Annealing at HiDec. STO (100). Addon RF Oxygen Plasma Soure In-situ Omicron STM/AFM kSA 400 RHEED kSA BandiT Temperature Monitor SRS RGA Crystal Eyes 7.0 Software

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Addon RF Oxygen Plasma Soure In-situ Omicron STM/AFM kSA 400 RHEED

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  1. Experimental Facilities Riber 32P MBE system Substrate Pretreatment System Atomic Scale Step Etching and Annealing at HiDec STO (100) • Addon RF Oxygen Plasma Soure • In-situ Omicron STM/AFM • kSA 400 RHEED • kSA BandiT Temperature Monitor • SRS RGA • Crystal Eyes 7.0 Software • Inficon QCM (in the future) • SVTA Ozone Delivery System kSA BandiT Software Ozone Delivery System CAFM, Ferroelectric Tester, HRXRD, TEM, and so on 1. Charge measurement from 0.80fC to 5.26mC 2. Capable of measuring hysteresis, small signal CV, IV, fatigue, imprint, and retention 3. 16 bit arbitrary waveform generator with a voltage range of -200V to 200V 4. Programmed to control MMR K-20 temperature controller

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