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Abdallah, Tawalbeh, Vasiliev, Zollner, Lavoie, Ozcan, Raymond (in preparation).

Complex Refractive Index of Ni-Pt alloys for optical metrology in nanomanufacturing of CMOS transistors (GOALI) Stefan Zollner, New Mexico State University, DMR 1104934.

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Abdallah, Tawalbeh, Vasiliev, Zollner, Lavoie, Ozcan, Raymond (in preparation).

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  1. Complex Refractive Index of Ni-Pt alloys for optical metrology in nanomanufacturing of CMOS transistors (GOALI)Stefan Zollner, New Mexico State University, DMR 1104934 Ni-Pt alloys (10 nm thick) on SiO2 were prepared at IBM (Albany Nanotech) by sputtering (similar to films used to contact 32 nm CMOS devices) . We optimized conditions for data acquisition and analysis of light reflected by a thin metal film. Amplitude y and phase D versus photon energy are shown at different angles of incidence. The complex refractive index and optical conductivity were obtained (far right). Optical conductivity for Ni1-xPtx alloys with (a) x=10%, (b) x=15%, (c) x=20%, (d) x=25%. Dotted lines: Annealed. With increasing Pt content, peaks in the optical constants broaden due to the overlap of Ni and Pt d-states. We will transfer these results to IBM for inline optical metrology in CMOS manufacturing. Abdallah, Tawalbeh, Vasiliev, Zollner, Lavoie, Ozcan, Raymond (in preparation).

  2. Undergraduate Physics Research at NMSU with Spectroscopic EllipsometryStefan Zollner, New Mexico State University, DMR 1104934 Undergraduate Research Students: Maria Spies, Cayla Nelson, Eric DeLong, Cesar Rodriguez, Travis Willet-Gies, Amber Medina. All attended a research conference (APS/AVS) and presented a poster. Graduate Student: Lina Abdallah was recognized by NMSU with a “Preparing Future Faculty” award for outstanding efforts in supplemental instruction, teaching algebra-based physics, and advising undergraduate research. Willet-Gies and DeLong traveled to Sandia for FTIR ellipsometry measurements at CINT (LaAlO3). SrTiO3 on Si LaAlO3 (IR) LaAlO3 Weiss, Zhang, Spies, Abdallah, Zollner, Cole, Alpay, Appl. Phys. Lett. 111, 054108 (2012). Nelson, Spies, Abdallah, Zollner, Xu, Luo, J. Vac. Sci. Technol. A (submitted). Dielectric functions for FeS2 (77 K), SrTiO3 on Si, and bulk LaAlO3 (VIS and IR) determined by undergraduate students.

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