New Materials for the Gate Stack of MOS-Transistors
New Materials for the Gate Stack of MOS-Transistors. Presented By: Ashesh Jain Tutor: Dr. Nandita Das Gupta Indian Institute of Technology, Delhi. Contents. Overview of MOSFETs Moore’s Law Problems with thin gate oxide: Gate leakage current, Polysilicon gate depletion, Boron penetration
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