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Presentation Outline. Design. Device Fabrication Process Flow Template. Copy and add additional layers if needed. Insert Process. 3 rd layer. 2 nd layer. 2 nd layer. Insert substrate. Insert substrate. Insert substrate. Processes Available (add other processes if needed).

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Presentation Outline

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  1. Presentation Outline Microfabrication Design Challenge 2011

  2. Design Microfabrication Design Challenge 2011

  3. Device Fabrication Process Flow Template Copy and add additional layers if needed Insert Process 3rdlayer 2nd layer 2nd layer Insert substrate Insert substrate Insert substrate Processes Available (add other processes if needed) UV Photolithography Spin coat Deep reactive ion etch Chemical Vapor Deposition (CVD) Spray coat Reactive ion etch Low Pressure CVD Wet etch Plasma Enhanced CVD PDMS Mold Dry etch Use the square selection tool in the drawing tool bar to select and move multiple objects at once. Microfabrication Design Challenge 2011

  4. Device Fabrication (Animation Template) • Insert fab steps here. • Place white shapes over layers to show etch and lithography steps. • Use custom animation feature to sequence the adding and etching of material. 4th layer 3rd layer 2nd layer Insert substrate here PMMA Microfabrication Design Challenge 2011

  5. Process Flow Microfabrication Design Challenge 2011

  6. Post-fabrication Modifications Microfabrication Design Challenge 2011

  7. Improvements Made in this Design Microfabrication Design Challenge 2011

  8. Conclusions Microfabrication Design Challenge 2011

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