1 / 15

UW NANO ROBOTICS GROUP

Microfluidics Propulsion & System Integration in MEMS Devices. UW NANO ROBOTICS GROUP. About UW_NRG. An undergraduate led research group comprised of students from multiple disciplines of engineering Mentored by faculty members including Professors Mustafa Yavuz and Omar Ramahi

jake
Download Presentation

UW NANO ROBOTICS GROUP

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Microfluidics Propulsion & System Integration in MEMS Devices UW NANOROBOTICS GROUP

  2. About UW_NRG • An undergraduate led research group comprised of students from multiple disciplines of engineering • Mentored by faculty members including Professors Mustafa Yavuz and Omar Ramahi Research interests in: • Integration of microfluidics, RF, photovoltaics, and digital logic for creating advanced devices • Improving MEMS technologies for industry adoption

  3. PROJECT • Designing a 300 micron diameter device to compete at the 2009 NanogramRobocup Competition • Robocup is an annual competition held to promote AI, robotics and related fields since 1993 • Nanogram is a NIST supported initiative to advance integrated MEMS devices

  4. DESIGN Overview • Cylindrical design utilizing a photovoltaic cell and two 10 micron air compressors • Pump actuation controlled by two phototransistors • Power delivery through photovoltaic cell • Two phototransistors control pump actuation

  5. Microcompressor – Principle • Flexible conductive membrane placed above fixed electrode forms compression chamber • Attraction between membrane and electrode with potential difference leads to air compression

  6. Microcompressor – Design • Shaped nozzles direct air flow to create net force in one direction • Variation between two pumps allow for steering • Computationally derived oscillation of 1mhz creates optimum thrust without resonant effects

  7. POWER TRANSFER • Germanium based IR detector on aluminum substrate • 100 micron diameter • Detects wavelengths from 850nm to 1550nm • 0 to 10V bias • 1 uA dark current

  8. PUMP Fabrication • Substrate is cleaned and Positive Photoresist is spincoated • PMMA (Microchem) • Achieve thickness of 2 microns • Substrate with photoresist is baked

  9. PUMP Fabrication • Mask patterns the electrode layer • Mask is removed and substrate is developed • Electrode layer is sputtered onto the substrate • Chromium (for adhesion) is used and sputtered to ~1 micron thickness • Remaining resists are removed

  10. PUMP Fabrication • PMMA and Copolymer is spincoated above the substrate • Used to pattern walls • Achieve thickness of 4 microns • Shape of pump and channels patterned with “v”-shape

  11. PUMP Fabrication • Patterned membrane shape and developed • Aluminum deposited onto Pattern • Approximately 2-3 microns thick • Remaining resist is removed

  12. PUMP Fabrication • Above membrane, photoresist is spincoated above again • Use of both PMMA and Copolymer • Bake photoresist and then deposit Aluminum • Remove Resist • Formation of top chamber

  13. CFD ANALYSIS

  14. Control of Microcompressor • Utilization of two different wavelengths for microcompressor control • Control each microcompressor individually

  15. Next steps • Complete solar array design for integration onto robot • Theoretical design will be outsourced to a photovoltaic foundry for fabrication • Development of a thin-film RF antenna has begun to use inductive coupling as a method of power transfer • Biocompatibility materials studies • Surface interaction optimization for robotic device movement

More Related