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Optimal Annealing and Oxidation Parameters for Improved Manufacturing Process

Learn about the standard manufacturing process including annealing and oxidation conditions. Find out the recommended temperature, time, pressure, gas type, and rotation speed for enhanced results.

jamesclewis
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Optimal Annealing and Oxidation Parameters for Improved Manufacturing Process

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  1. 標準製程 • Annealing • Temperature:600~1150℃ • Time:5~300 sec • Pressure:5~760 torr • Gas:N2、O2 • Rotate:60~90 rpm • Oxidation • Temperature:600~1150 ℃ • Time:10~300 sec • Pressure:5~760 torr • Gas:O2 • Rotation:60~90 rpm

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