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標準製程

標準製程. Annealing Temperature:600~1150 ℃ Time:5~300 sec Pressure:5~760 torr Gas:N2 、 O2 Rotate:60~90 rpm Oxidation Temperature:600~1150 ℃ Time:10~300 sec Pressure:5~760 torr Gas:O2 Rotation:60~90 rpm.

jamesclewis
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標準製程

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  1. 標準製程 • Annealing • Temperature:600~1150℃ • Time:5~300 sec • Pressure:5~760 torr • Gas:N2、O2 • Rotate:60~90 rpm • Oxidation • Temperature:600~1150 ℃ • Time:10~300 sec • Pressure:5~760 torr • Gas:O2 • Rotation:60~90 rpm

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