HV/HR-CMOS DEVELOPMENT Oxford, Glasgow, Liverpool, Sheffield and RAL

1. HV/HR-CMOS DEVELOPMENT Oxford, Glasgow, Liverpool, Sheffield and RAL

2. HV/HR-CMOS • HV/HR-CMOS is an emerging technology for ionising radiation sensing which could yield improved performance and significant cost savings to HEP tracking systems. The validation of this technology for HEP applications requires: • Collaboration with foundries for taking the technology to maturity • Design of devices to validate/provide feed-back to foundries for improving the performance and implementing radiation tolerant solutions. • Dedicated simulation and measurement programs requiring precision instrumentation, organized test beam and irradiation efforts to: • Investigate the differences in CMOS electronics to optimize the design for specific applications e.g. simple analogue output, digital output, and ganged pixels for a strip design • Optimise the fill factor and low noise performance • Develop and improve device modelling • Determine the yield • Demonstrate radiation hardness up to 2E16 neq cm-2 and/or >1 GRad including surface (dielectric), interface (oxide/semiconductor) and bulk damage studies • Understanding of the annealing of the device and the required operational temperature after a given fluence

3. DEVELOPMENT OF RADIATION HARD TRACKING SENSORS WITH TowerJazz • TowerJazz is a world-leading producer of imaging sensors. • The RAL group has extensive experience designing sensors in the TowerJazz process. • A collaboration with TowerJazz is proposed for producing CMOS sensors for HEP silicon trackers. • The objectives are: • Incorporate a back-biasing structure into the TowerJazz process to create a drift field to collect the charge deposited by ionizing radiation • Demonstrate that a large area tracking sensor with a well-controlled signal to threshold ratio can be produced and measure the yield • Demonstrate the radiation hardness of the process

4. MEASUREMENT PROGRAM • A coordinated measurement program must be in place to provide timely feed-back to TowerJazz and other foundries that have processes of interest for particle physics and taking these technologies to maturity • Open issues with the technology require prompt investigation through measurements at dedicated laboratory set-ups, testbeam efforts, and infrastructure. • It is essential to study and model these devices to develop/implement/evaluate radiation tolerant solutions • EVALUATION METHODS before and after irradiation • Lab measurements (transistor and dedicated test structure characterisation for surface and interface damage studies). • Lab measurements (IV-CV measurements of sensors and test structures for bulk damage studies) • Lab and testbeam measurements: functional measurements (signal from mip’s, x-ray, lasers for charge collection efficiency , tracking efficiency and resolution studies). • TCAD model implementations • Development (refinement) of the simulation models (TCAD) for HV-CMOS technologies. • Development & integration of the radiation damage parameters in these models.

5. FUNDING REQUEST: SUBMISSIONS WITH TowerJazz • Funds are sought for two submissions to TowerJazz to study the potential of this technology • Run 1 • Design a back-biasing structure in TowerJazz 180nm • Design a range of small scale test pixels, transistors, basic logic elements using radiation hardened techniques, including circular transistors. • Test die before and after irradiation  • Run 2 Based on outcome from Run 1 • Refine design • Design a large area pixel sensor (approaching reticule size) with the bulk of the integrated electronics at the periphery of the sensor to minimise the interference of digital activity with detection elements. • Include test structures to understand the signal to threshold performance in a larger scale sensor. • Confirm radiation hardness and understand digital interference

6. FUNDING REQUEST: MEASUREMENT PROGRAM • Funds are sought to setup the necessary testing program dedicated to evaluate and comparing all sensors produced in HV/HR-CMOS processes within the AIDA 2 effort. • The funds will target: • DAQ development boards / control GUIs to put in place an infrastructure to enable easy evaluation of the sensors. • Travel for beam tests, to visit labs for tests and irradiations • Strengthen or develop the expertise for specific testing e.g. x-rays, laser, test beam analysis, electrical characterisation and also assembly expertise (glue distribution, wire bonding etc) • THE SPECIFIC FUNDING REQUESTS WILL REQUIRE FURTHER DISCUSSION BETWEEN THE GROUPS AND THE WP PARTNERS

7. CAPABILITIES and EXPERIENCE • RAL: • Development of MAPS in HR/HV-CMOS. Examples: • MAPS for Alice upgrade with Tower Jazz 0.18μm CMOS imaging technology allowing deep p-well • CHERWELL chip for LC with 25um pitch achieving a 3.5 μm hit resolution • Lassena chip for x-ray imaging shows the stitching capabilities (139.2mm x 120mm focal plane) • Glasgow, Liverpool, Oxford, RAL, and Sheffield • Experience from the construction of CMS pixel and/or ATLAS SCT & IBL • Cleanroom facilities for sensor characterization including probing and DAQ readouts. • Radiation hardness studies and Beam tests • Glasgow • CCPD2 HV-CMOS ROC testing • Liverpool • CMOS design capability • Oxford • On-going work evaluating PIMMS • Sheffield • Infrastructure for radiation hardness studies PIMMS: Pixel IMaging Mass Spectroscopy (RAL-OXFORD) Lassena (RAL/UK)

8. DELIVERABLES • Development and evaluation of TowerJazz technology for particle physics applications, especially LHC Phase 2 & ILC • Development and evaluation of HV/HR-CMOS produced for the AIDA 2 consortium • TCAD model implementations