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PI : Dr. Andrei Shkel (MAE, EECS) Co-PI : Dr. Jann Yang (CEE) Co-PI : Dr. Patrick Guidotti (Math)

Broad-Bandwidth High-Resolution MEMS Array of Inertial Sensors with Embedded Optical Detection. University of California - Irvine. PI : Dr. Andrei Shkel (MAE, EECS) Co-PI : Dr. Jann Yang (CEE) Co-PI : Dr. Patrick Guidotti (Math). Innovations : Polymer MEMS technology

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PI : Dr. Andrei Shkel (MAE, EECS) Co-PI : Dr. Jann Yang (CEE) Co-PI : Dr. Patrick Guidotti (Math)

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  1. Broad-Bandwidth High-Resolution MEMS Array of Inertial Sensors with Embedded Optical Detection University of California - Irvine PI: Dr. Andrei Shkel (MAE, EECS) Co-PI: Dr. Jann Yang (CEE) Co-PI: Dr. Patrick Guidotti (Math) • Innovations: • Polymer MEMS technology • Embedded optical detection (Fabry-Perot) • Micro-g resolution, wide frequency bandwidth (1kHz) • Each sensor is a dynamic optical multiplexer of the network Enabled Applications: low-maintenance sensor networks, medical diagnostics, seismology, acoustic sensing, health monitoring of civil structures including micro-vibrations of high-tech facilities, navigation

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