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전컴654 플라즈마공정론 1반

전컴654 플라즈마공정론 1반 1.강의 목표 저온 플라즈마의 기본현상, 플라즈마 장비, 및 에칭 / deposition, PDP 에 대한 기본적인 이해를 목표로 함. ( Fundamentals for basic Phenomena in low-temp. plasmas, plasma devices, etching/deposition, plasma display panel) 2. 선수 과목 및 수강의 필수사항 전자기학( E&M) 1 과목이상

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전컴654 플라즈마공정론 1반

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  1. 전컴654 플라즈마공정론 1반 1.강의 목표 저온 플라즈마의 기본현상, 플라즈마 장비, 및 에칭 /deposition, PDP에 대한 기본적인 이해를 목표로 함. (Fundamentals for basic Phenomena in low-temp. plasmas, plasma devices, etching/deposition, plasma display panel) 2. 선수 과목 및 수강의 필수사항전자기학(E&M) 1과목이상 3. 성적 평가 방법Homeworks, Projects, Open-Book Exams 4. 강의 교재MA Lieberman and AJ Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, 1994) 5. 참고도서 6. 강의 진도 계획week (1) Chs. 1-2 (plasma basics) week (2-3) Chs. 10 & 14 (global modeling; dc and plasma display)week (4-5) Chs. 4-5 (plasma phys. & transport)week (6-8) Chs. 7,8,9 (plasma chemistry)week (9-10) Chs. 6,11,12 (plasma sheath & devices)week (11-13) Chs. 15,16 (plasma etching and deposition)*The above schedule subject to minor changes 7. 기타 참고 사항 To be taught in EnglishThe updated announcements here to be watched constantly

  2. (Newtonian eqs) Ch.2 ◎Kinetic Eqs & Equil.Maxwell Distr Distribution Function as averaged quantity from truly kinetic : A bit more continuum(averaged, coarse-grained) Defined only on phase space meshes Fluid: n(xi,t) define only on spatial meshes Boltzmann eq with an unclosed form of collision term L&L(2.3.3),Golant(3.17) -Kinetic Simulations •Mol-Dynamics Sim •Particle Sim(P-P) •PIC (PIC/MCC;P3M;P-M) •Vlasov sim(Boltzmann Sim)

  3. ◎Saha eq -F.chen: (T in °K, n in m-3) -Golant: (T in eV, n in cm-3) -Boulos: -Bolzmann statistics Thus

  4. *Collision Integral (L&L,Appendix B) f1: incident ptl’s distr. fn. (v1) f2: target ptl’s distr. fn. (v2) *The flux of incident ptls in a nest frame where v2=0 .reactive velocity .(#of incident ptls) *the #of incident ptls (per time) scattered out of the volume d3v1d3v2 into d is I-differential x-section for scattering thru elastic scatt. (scattered ptls:primed) (scattered) (incident) *Fokker-Plank Eq. (for small-angle binary Coul.coll. expansion ) dyn. friction vel. diffusion

  5. *Maxwellian Distr. -at equil. -Boltzmann -H-theorm Golant §4.2 (Internal energy of the j-state)

  6. V-dependent coll. Freq. High-v2

  7. Ee Ei 0 50 100 1 10 100 ◎EEDF Druyvesteyn (5<Ee<20) Maxwellian -Using the Stewart(PSST`95,P39) fitting formula We integrate eqs.(1)&(2) for theory EDF or Use Godyak (PRL`98)

  8. ◎ION EDF : IEDF - ion – neutral collision : strongly anisotropic The linearization as for EEDF is not appropriate - : Boltzmann equation for i Charge exchange collision (1) If = const, then (X-section) Maxwell (2) If S [2] ln [1]const M

  9. Fluid Eqs. & MHD Eqs. MHD eqs. 2-fl. Eq. -Fluid eqs.from Kinetic Eq. Taking 0th moment of Eq. of Continuity 1st moment of Eq. of motion 2nd moment of Energy balance eq.

  10. +q ◎ Debye Length(Shielding) -Basic Plasma Scales -Length: Debye Length -Time : Plasma oscillation period & -Debye Shielding (due to abundant plasma particles(esp. electrons) external charge (1)Why shielding ? (2)consequence of the shielding:

  11. Strong coupled ( P.E >> K.E. ) matter ( ie, solid ) Weakly coupled matter (ie, plasma, K.E.>>P.E. ) -Derivation of the Debye-shielded Potential

  12. ◎ T (eV) vs T(K) ◎ mmHg

  13. Ch.3 Collisions ◎Why do we need collisions? ◎Types of Collisions 1)Elastic Collisions -Coul. Coll. (e-e, e-i, i-i ) -Polariz. Coll. (e-N, i-N) v 2)Inelastic Collisions(KE non-conserved) -Ionization Coll. -Excitation Coll. (Meta stable Neutral) -Charge Transfer a +

  14. ◎Collisions in Argon •The mean free path for ionizing electrons is comparable to source dimensions. •The electron-neutral ionization rate is uniform. •The eedf is a Maxwellian, with Te uniform. •Argon is used as a reference, with second order rate constants Kiz, Kexc, and Kel, and Resonant charge transfer of on Ar exceeds elastic scattering. The combined ion cross section is Large , and

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