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10 equations that everyone in MEMS should know

10 equations that everyone in MEMS should know. Hooke’s law: F=-kx. K = 3EI/L^3 K = JG/L. Fluidic damping. Couette Squeeze-film. Electrostatic force. Voltage term Geometry term Constant charge Paschen curve. Newton’s second: F=ma. M $frac{a}{x}+b {x}+Kx=F_{ext}$

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10 equations that everyone in MEMS should know

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  1. 10 equations that everyone in MEMS should know

  2. Hooke’s law: F=-kx • K = 3EI/L^3 • K = JG/L

  3. Fluidic damping • Couette • Squeeze-film

  4. Electrostatic force • Voltage term • Geometry term • Constant charge • Paschen curve

  5. Newton’s second: F=ma • M $\frac{a}{x}+b {x}+Kx=F_{ext}$ • H(s), H(0), H(j\omega), • Resonance, Q

  6. Heat flow: qdot = g delta-T

  7. Virtual work • F=-grad U

  8. Equipartition theorem: U=1/2kBT

  9. Ohm’s law: V=IR • Kirchoff’s laws

  10. Q=CV • C=eps A/d

  11. Heat capacity

  12. KVL and KCL • For electronics, fluidics, and general Lagrangian systems (e.g. SUGAR)

  13. Conservation of energy

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