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Scanning Electron Microscopy Techniques and Equipment In ASU’s Physics and Astronomy Department

Explore operation, imaging, X-ray analysis, FIB microscopy, applications, troubleshooting, and materials analysis using state-of-the-art SEM equipment at ASU's Physics Department. Gain insights into carbon nanotubes, fiber optic machining, and nano-scale material analysis.

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Scanning Electron Microscopy Techniques and Equipment In ASU’s Physics and Astronomy Department

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  1. Scanning Electron Microscopy Techniques and Equipment In ASU’s Physics and Astronomy Department Professor Dr. Phil Russell Student Presenters Luke Robertson Jonathan Ivey James Phillips

  2. Abstract • Operation of Scanning Electron Microscopes(SEM) • Imaging • X-ray Microanalysis • Operation of Focused Ion Beam(FIB) Microscope • Machining • Etching • Deposition • Applications of SEM & FIB • Carbon Nanotubes • Troubleshooting of Micro-processors • Fiber Optic Machining • Micro to Nano-scale Materials Analysis • Solar Cell Materials Analysis

  3. A B Microscopes • Hitachi S570 W filament SEM • Lower resolution than other SEMs in department • Has a Oxford Silicon Drift Detector attached to measure X-ray energies to determine material composition • ASU’s learning SEM • B) SEM micrograph of gold on carbon

  4. A B C Microscopes • Hitachi S4000 Field Emission SEM • Maximum magnification of 300,000x • Lower beam current but smaller spot size • Atomic Force Microscope tip • High magnification micrograph of quartz filter paper with gold coating detailing cracks in the coating

  5. Microscopes • Hitachi FIB-2100 • Images with heavy Gallium ions instead of electrons • Capable of etching out samples for subsurface analysis • Through gas injection system, can deposit different metals onto substrates • Hitachi LaB6 • Similar to S570, but uses LaB6instead of Tungsten filament • Able to achieve magnifications of 500,000x • Uses lower beam current than S570, so we can get better signal to noise (resolution)

  6. A B C Images from the S570 • Broken Solar Cell • Unknown Sample • X-Ray Spectrum

  7. Images from the LaB6 Carbon Nanotubes

  8. Images from the TM3000 Honey Bee Eye Hitachi TM3000

  9. Conclusion • Instruction into the operation and components of SEM and FIB provides undergraduate students with an opportunity to learn about techniques for materials analysis. • Knowledge of the operation of SEMs provides a background for performing further research in the area of materials science • Understanding the components of SEMs and how they operate offers a better understanding of electrical physics and its applications.

  10. Acknowledgements • NSF STEP Grant • Dr. Phil Russell • Dr. Rahman Tashakkori

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