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Laser slotting of silicon for inkjet printer heads

Laser slotting of silicon for inkjet printer heads. Tuan Anh Maia, Delphine Perrottet*a, Max Wikia and Bernold Richerzhagena aSynova SA, Ch. de la Dent-d’Oche, CH-1024 Ecublens, Switzerland. Paper Survey. Chin-Ting Lin Institute of Mechanical Engineering Date ﹕ 2011/05/30. Outlin e.

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Laser slotting of silicon for inkjet printer heads

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  1. Laser slotting of silicon for inkjet printer heads Tuan Anh Maia, Delphine Perrottet*a, Max Wikia and Bernold Richerzhagena aSynova SA, Ch. de la Dent-d’Oche, CH-1024 Ecublens, Switzerland Paper Survey Chin-Ting Lin Institute of Mechanical Engineering Date ﹕2011/05/30

  2. Outline Introduction Conventional manufacturing procsses Water-jet-guided laser Damage-free laser slotting Conclusion 2

  3. Introduction Thermal Bubble Jet Technology Figure 1: Basic principle of a inkjet-printer head.

  4. Conventional Manufacturing Procsses • Sandblasting • Narrow slots below 150 microns. • Etching • Slow and expensive • Require masks.

  5. Water-jet-guided Laser Figure 2: Basic principle of the water-jet-guided laser technology

  6. Damage-free Laser Slotting Nd:YAG laser Wavelength 532 nm Cutting speed: 1.2 mm/s Nozzle:100um 675um Figure 3: Slot end (broken after cutting)

  7. Damage-free Laser Slotting Nd:YAG laser Wavelength 532 nm Cutting speed: 1.2 mm/s Nozzle:30um Figure 5: Chip backside, free of chipping

  8. Damage-free Laser Slotting Nd:YAG laser Wavelength 532 nm Cutting speed: 1.2 mm/s Nozzle:30um Figure 4: Race track

  9. Damage-free Laser Slotting Nd:YAG laser Wavelength 532 nm Cutting speed: 5 mm/s Nozzle:30um Figure 6: Slot exit side

  10. Conclusion The water-jet-guided laser technology has proved its capabilities of matching the requirements of silicon slotting for inkjet-printer heads. After a short phase of parameter optimization, the required quality and speed were not only reached but also surpassed. The produced slots are free of any length or depth limitations and the quality remains constant over time.

  11. Thanks For Your Attention!!!

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