A Universal Microscale Mechanical Tester

1. A Universal Microscale Mechanical Tester Daniel C. Ralph, Cornell University, ECCS 0335765 This work is aimed at creating a microfabricated mechanical test platform. This system consists of a reusable chip capable of large-displacement actuation, while interfacing to a test coupon chip compatible with synthesis conditions for several nanomaterials. The actuated test platform chip contains a thermal actuator driving a compliant displacement amplification transmission, and a bulk-micromachined well in which the test coupon chips may be placed and removed. The displacement amplification structure provides 40 μm of output displacement, extending a probe over the well and into contact with the test coupon. The test coupon contains compliant structures that are actuated by the probe from the test platform. Fabrication process sequence J. J. Brown, D. A. Dikin, R. S. Ruoff, and V. M. Bright, University of Colorado Work performed at the Colorado Nanofabrication Lab Micrograph of one of the universal test structures including a thermal actuator, a transmission structure and probe. Displacement versus actuator input current measured for a UTC chip with and without a test coupon JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 21, NO. 2, APRIL 2012