Kanomax FMT - LNS Model 9310 Brochure

1. NANOPARTICLE MEASUREMENT SOLUTIONS Liquid Nanoparticle Sizer (LNS) System Model 9310 Size Nano Colloids Precisely and Quickly CMP Slurry Characterized with the LNS System • 6 – 360 nm measurement range in under 5 minutes • Actual quantitative concentrations • Any particle, any shape, any composition, any distribution (including multimodal) • Great for CMP slurry, resin rinse, bio-pharma, and filter characterization, monitoring, and control Multi-Mode CMP Slurry Measurement 2.0e+16 Multi-mode colloids are easily distinguished 1.8e+16 Differential Volume Concentration 1.6e+16 1.4e+16 d(nm3/mL/d log (DP) 1.2e+16 1e+16 8e+15 6e+15 4e+15 2e+15 0 10 20 30 40 50 60 70 80 90100 Particle Diameter (nm) Van Schooneveld et. al., Nanotech 2011: Technical Proceedings of the 2011 Nanotechnology Conference and Expo Filter Performance Testing Resin Rinse Benchmarking 30 nm Rated Water Filter Challenged with 2E8 #/ml (6 ppm) 30 nm Particles UPW Rinse of Ion Exchange Resin 1e+9 100 Cummulative Particle Concentration Added Resin A Resin B Resin C Resin D Resin E Resin F Spool 80 1e+8 (#/mL >10 nm) Retention (%) 60 1e+7 40 1e+6 Silica PSL Gold Filter retention depends on the challenge particle 20 Resin rinse times vary widely 1e+5 0 1 10 100 1000 0.000 0.025 0.050 0.075 0.100 0.125 0.150 0.175 0.200 Flush Volume (Liters UPW) Fractional Coverage (Monolayers) Van Schooneveld et. al., American Filtration Society Spring Conference, Minneapolis, MN, 2013 Data prepared and presented by CT Associates to the SEMI Ion Exchange Task Force on 02/27/2014 Industry Recognition • C79-0113 Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems • C93-0217 Guide for Determining the Quality of Ion Exchange Resin Used in Polish Applications of Ultrapure Water Systems

2. Principle of Operation Aerosolization Particle Size Distribution Measurement Concentration Particle Diameter Colloid Sample Engineered Nebulization Evaporation Charge Conditioning, Electrical Mobility-based Particle Size Classification Condensation Particle Counter Integrated Software Platform - Kanolysis • All-in-one control of the LNS system • Automated sampling sequence • Real-time data analysis Specifications Particle size range: 6-360 nm Particle size resolution: 64 channels per decade of size Measurement time: <5 minutes Inspection volume rate: 0.2-1.0 μL/min Total liquid sample flow rate (online): 50-280 mL/min Nebulizer flow rate: 0.5-3.0 mL/min (direct injection) Dilution factor range: 50-20,000 Colloid concentration range (post dilution): 3E7-3E11 number/mL Response time to concentration change: <90 seconds Inlet water pressure (online): 140-300 kPa (20-45 psig) Compressed air flow rate/pressure: 2.5 std L/min CDA or Nitrogen 2.8 bar (50-60 psi) Wetted surfaces (before nebulization): PFA, PTFE, sapphire, 316L stainless steel, PEEK CPC working fluid: n-butyl alcohol (butanol) I/O Communications: Ethernet, internal memory Power requirements: 100/115/220/240 VAC; 50-60 Hz Operating temperature: 10-35°C Operating humidity: 0-90% RH non-condensing Storage temperature: 5-35°C Dimensions: 9.5 × 8 × 36 inches (D/W/H) Software – computer operating system: Windows 10 K Kanolysis - View Analysis View Analysis Example Plot 500 Concentration (#/ml) 400 300 200 100 0 1 2 5 10 2 5 100 2 5 1000 Diameter (nm) Statistics Refer to individual product sheets for component details. Computer not included. Geometric Mean Diameter (nm) GSD Total Concentration (#/ml) D10 (nm) D50 (nm) D90 (nm) Measured Data Single Mode Curve Fit Mode 1 Curve Fit Mode 2 Curve Fit 40.7 44.3 27.9 114 2.32 2.14 1.80 1.54 2.91e+4 2.72e+4 2.08e+4 6.75e+3 14.4 16.2 12.9 64.3 34.5 41.9 26.2 112 132 120 61.0 194 Specifications subject to change without notice. The LNS System was developed in collaboration with CT Associates, Inc. The LNS System uses a soft X-ray charge conditioner. Patent Protected • Patent numbers 8,272,253 and 8,573,034 have been issued to CTA and licensed by Kanomax. • Kanomax has applied for additional domestic and international patents for technology contained within the LNS System. • Patent number 7,852,465 has been issued to Kanomax. Kanomax FMT and the Kanomax Group have unique aerosol expertise and can deliver powerful solutions to your nanoparticle measurement challenges. Let’s get started - connect with us today! +1 651.762.7762 • ContactUs@KanomaxFMT.com • www.KanomaxFMT.com • Follow us on Facebook and LinkedIn Distributed by: Kanomax FMT, Inc. 4104 Hoffman Road White Bear Lake, Minnesota 55110-3708 USA Phone +1 (651) 762-7762 Fax +1 (651) 762-7763 www.KanomaxFMT.com Flaretek is a registered trademark of Entegris, Inc. Swagelok is a registered trademark of Swagelok Company Windows is a registered trademark of Microsoft Corporation Printed in the USA. 6/2019 Copyright © 2019 Kanomax FMT