1 / 16

The ANKA Vacuum System

The ANKA Vacuum System. S.Hermle A.Völker E.Huttel T.Fischböck. ANKA Parameter. In operation: 3 Beam lines for Micro fabrication 9 Analytical Beam lines In planning: 3. One of the Row. Ingmar Lehmann, FMB Lothar Schulz, SLS Erhard Huttel, ANKA. Vacuum Chamber Lay Out.

kareem-bryan
Download Presentation

The ANKA Vacuum System

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. The ANKA Vacuum System S.Hermle A.Völker E.Huttel T.Fischböck

  2. ANKA Parameter In operation: 3 Beam lines for Micro fabrication 9 Analytical Beam lines In planning: 3

  3. One of the Row Ingmar Lehmann, FMB Lothar Schulz, SLS Erhard Huttel, ANKA

  4. Vacuum Chamber Lay Out

  5. Lay out, Continued Large Chamber (Dipole plus following Quad /Sextupole ) e-beam Chamber plus Ante Chamber Each ante chamber: Lumped absorber (Covering 80% of SR) Large (500/300 l/s) pumps Following chamber: e-beam chamber only Distributed Absorber Small pumps (150 l/s) every 1.5 m

  6. Pumping Standard Diode Ion pumps Varian 16 x 500 l/s 16 x 300 l/s 63 x 150 l/s 30 Controller 300 l/s + 500 l/s connected to 1 Contr. Up to 8 150 l/s connected to 1 Contr. Each pump current measured

  7. Vacuum Preparations and Assembling Specification: Leak rate < 10-10 mbar l/s Desorption rate: < 10-12 mbar l/ (s cm2) Masses>40 < 0.01 No Firing Baking and test at factory Baking and assembling on side (Pumps, gauges, absorber) Venting with N2 Assembling in storage ring Pumping

  8. Production

  9. Expected Vacuum Behavior Lumped Absorber V.V.Anashin et al. EPAC(1998)2163 Distributed Absorber C.Herbeaux et al. Vac60(2001)113 Exposed: 0.035 m Factor 10 difference for dose per length 10 Ah 100 Ah

  10. What We Get (Logarithmic Scale) ! Saturation due to Touscheck SLS Prediction PAC98 Linear in Energy and Current

  11. What Happened (Linear scale) ! SCU14 Kr Accident SUL Wiggler With more Valves now, 10 Ah to recover when venting straight section only Wera Undulator + Broken Window 50 Ah to recover, when ¼ of storage ring vented N2 100 Ah, when vented with air

  12. Major Accident I (Kr Lamp 2002) Syn.Rad. Kr lamp for baking behind Be – Mirror (Exposed to SR) Broke (Standard diodes do not pump noble gases) Pumped Storage Ring with Turbo Pumps While baking all Pumps Recovered!! Not my design!! They did not tell us! Look for the BL design!! Conclusion: Standard Diodes or ok

  13. Major Accident II 2003 (Broken FE Window) Pyrex window in Diagnostic Front End Replaced after 3 Year of Use (became brown) New one broke after 6 month Syn.Rad. Exposed SR to air H2O !, Not dry N2 ! Cleaning with Syn.Rad. took 100 Ah to recover!

  14. Instrumentation (Storage Ring) No Pirani, I do not miss them ! 12 Penning Gauges 4 QMS 95 Ion Pump Current Monitors

  15. Manufacturer

  16. Conclusion

More Related