个人简历

1. 个人简历 • 美国大学工程学学士、硕士、博士 • 美国德州电子仪器公司芯片测试工程师，芯片生产工程师，开发部经理。 • 美国阿肯色大学电子工程学教授。 • 发表论文170多篇。 • 完成多项研究项目，价值超过美金1500万。

2. 个人简历 • 博士生导师，指导过65位博士和硕士生。 • 获得伦敦城市行业教育学会的“CGIA”文凭。 • 写了关于开关电源技术方面的书一本，书名为“Power Switching Converters” • 美国电解化学协会委员。 • 微电子封装研究所主任。

3. University of Arkansas

4. Micro-Electro-Mechanical Devices Simon S. AngProfessor of Electrical EngineeringUniversity of ArkansasUSA

5. What is Micro-Electromechanical Device or MEMs? • Imagine machines so small they are imperceptible to the human eye. • Imagine working machines with gears no bigger than a grain of pollen.

6. What is MEMS? • Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate using micro-fabrication technology.

7. MEMS Applications • Air Bag Sensor - crash-bag deployment in automobile (accelerometer) • Ink Jet Printer • Bio-MEMS – Polymerase Chain Reactor (PCR) for DNA amplification and identification

8. MEMS Accelerometer Automotive --  Testing, Suspension, Air BagsAgricultural --  Harvesting shock & vibration, Production line monitoringManufacturing -- Testing, Production line monitoring, Shipping monitoringTransportation  --  Rail-car sensing, Shipping monitoring, TestingDown Hole Drilling -- Tilt/Attitude sensing, Machinery healthNASA -- Vibration Monitoring, Testing (From Silicon Design Inc.,)

9. A Portable PCR DeviceBiological Detection Technology for Counter – Terrorism(Lawrence Livermore Laboratory)

10. Sandia’s Micro-Mirror

11. Spider Mite on a Sandia’s Micro-Mirror

12. Spider Mite Approaching a Sandia’s Micro-Gear Assembly

13. Micro Spacecrafts

14. Microthruster

15. Microthruster Microcombustion testing

16. Microthruster Microthruster firing sequence

17. Basic Surface Micromachining Process Sequence I. Deposit Sacrificial Layer IV. Pattern Mechanical Layer II. Pattern Sacrificial Layer V. Release Mechanical Layer +V III. Deposit Mechanical Layer VI. Test Device

18. Microelectronic Fabrication Photomask Fabricated Devices

19. Processing Equipment

20. Processing Equipment

21. Processing Equipment

22. Processing Equipment

23. Processing Equipment

24. Processing Equipment

25. Processing Equipment

26. Aluminum Wire Bonder

27. Gold Wire Bonder

28. Wire Bond Pull Tester

29. Measurement Equipment

30. Microelectronic Cleanroom Operation

31. Microelectronic Cleanroom Operation

32. Microelectronic Cleanroom Operation

33. Microelectronic Cleanroom Operation

34. Microelectronic Cleanroom Operation

35. Microelectronic Cleanroom Operation

36. Wire Bonding

37. Microfluidic Devices • Microfluidic devices are MEMS devices with micro-scale (10-6m) or nano-scale (10-9m) flow channels • They come with valves, electrodes, heaters, and other features • These microfluidic devices can be used as tiny chemical processing or reaction system, consuming only tiny amount of chemical – micro-TAS (micro total analysis system)

38. Post-type Filter

39. Comb-Type Filter

40. Glass cover Silicon plate Inlet Outlet Weir-type Filter 50µm

41. Weir-type Filter 50µm

42. In Chip Immunofluorescent Cell Detection Glass cover Labeling Fluorescent Microscope Detection Silicon Plate Fluorescent labeled antibody Cell Labeled cell

43. Beads in the Microchannels Deep channel (before filter chamber) Shallow channel (After filter chamber)

44. Confocal Images of Microchannel Shallow channel Deep Channel

45. Fluent Simulations of Microfilter Chip 3μm weir gap Flow rate=2mm/s 1μm weir gap Flow rate=2 mm/s 6μm weir gap Flow rate=2mm/s 9μm weir gap Flow rate=2mm/s

46. Fluent Simulations of Microfilter Chip Depth=10μm 1μm weir gap Depth=30μm 50µm Flow rate=0.5mm/s Depth=50μm Flow rate=1mm/s

47. Labeling efficiency along the weir

48. Trapping Efficiency

49. On slides 9 steps Takes more than 1 h Consumes 20µl cells solution and 25 µl labeling reagent Within filter chip 3 steps Takes less than 0.5h Consumes 2 µl cells solution and labeling reagent Comparison with the conventional detection on slides

50. Pillar-Type Microfludic Filter Chip