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나노 기술

나노 기술. 기능성 산화물 박막 기술 Scanning Probe Microscope. 2002년 5월 23일 송태권. 참고 자료. 나노연구소 http://designwith.net/nano/?t=home Handbook of Nanostructured Materials and Nanotechnology. Nano?. Macro vs . Micro. Nano vs . Micro. Two ways in Nanotech. New function in nano-scale Not just size

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나노 기술

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  1. 나노 기술 기능성 산화물 박막 기술 Scanning Probe Microscope 2002년 5월 23일 송태권

  2. 참고 자료 • 나노연구소 http://designwith.net/nano/?t=home • Handbook of Nanostructured Materials and Nanotechnology

  3. Nano? Macro vs. Micro

  4. Nano vs. Micro

  5. Two ways in Nanotech. • New function in nano-scale Not just size • Bottom-up • Nanotube, Semiconductor Quantum Dots • Top-down • Nanoparticles, Nano-sized powders

  6. Gate Oxide/Memory Capacitor

  7. MEMS or NEMS (Nano-Electro-Machining System)

  8. Metal Oxide Thin Films

  9. Perovskites Ferroelectric Optical Magnetic Conductive High TC Superconductive Transition Metal Oxides ; Multi-valence

  10. Ferroelectric • Ti, Zr, Nb, Ta Oxides • BaTiO3, Pb(Zr,Ti)O3, Bi4Ti3O12, La-Bi4Ti3O12, SrBi2Ta2O9 • DRAM • FRAM(Ferroelectric RAM) • IR detector

  11. DRAM Application • High Density → Small Area → Complex Structure → High e

  12. Optical • Nb, Ta Oxides • LiNbO3, LiTaO3 • SAW (Surface Acoustic Wave) • Non-linear Optics • Optoelectronics

  13. Magnetic • Mn, Co, Fe Oxides • (La,Sr)MnO3 • Magnetic Head (CMR) • Magnetic Memory (MRAM) • Spintronics

  14. Conductive • Cu, Co, Ti Oxides • (La,Sr)CoO3 • Interconnect

  15. HTSC(High TC Superconductive) • Cu Oxides • YBa2Cu3O7-d • Joshephson Junction • SQUID • Bolometer

  16. Detailed Topics Oxygen Vacancy Reduction Multifunctional Devices Oxygen Vacancy Reduction Multilayer Films Oxide Superlattices High Density Devices Nano-Technology Strain Control

  17. Schematic of a FIOH Transparent Electrode (ITO) Pyroelectric (BSN, PLZT) Ferroelectric (BT, PZT) CMR Material (LSMO, LCMO) Oxide Substrate Photon; hn Monolithic Oxide Integrated Circuit Light hn Pyroelectric DP (DT) Ferroelectric DP (DT) CMR Material DR Data Storage Retrieving Data Signal Sensing & Transformation

  18. GMR vs. CMR • Giant Magneto-Resistance • in Magnetic Metal Multilayers(Superlattices) • Colossal Magneto-Resistance • in Magnetic Oxides

  19. Applications of Ferroelectric Thin Films

  20. Thin Film Deposition • PVD (Physical Vapor Deposition) • PLD (Pulsed Laser Deposition) • Sputtering • CVD (Chemical Vapor Deposition) • MOCVD • Sol-gel

  21. Pulsed Laser Deposition

  22. Ion Substitution Effects

  23. Strain Effects

  24. Scanning Probe Microscope • STM (Scanning Tunneling Microscope)

  25. Piezo-Micro-Manipulator

  26. AFM (Atomic Force Microscope) • Non-conductive Materials like Dielectrics • In Air → Easy to Use

  27. SCM (~ Capacitance ~) • Resonance Frequency

  28. Applications of SCM - I • Semiconductor MOSFET

  29. Applications of SCM - II • Memory Application

  30. EFM(Electric Force Microscope)

  31. EFM – Ferroelectric Domain

  32. MFM(Magnetic Force Microscope)

  33. MFM-Hard Disk Surface

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