ADO - Automatic Door Opener

1. DS-01031ADO_0810.qxd 9/8/06 11:52 AM Page 1 ADO Automatic Door Opener™ 300mm FOUP Load Port for Automated Wafer Handling Kensington Laboratories, an industry leader in advanced robotic automation, offers the Automatic Door Opener™ (ADO), a 300mm Load Port designed for today’s rigorous wafer isolation and fab requirements. The ADO offers a host of patented, unique design features which combine to provide superior operational speed, cleanliness, reliability, and integration flexibility for loading and unloading SEMI standard 300mm FOUPs. Kensington’s ADO is proven in volume manufacturing at major 300mm production fabs and is backed by Kensington’s global service and support network. • Interoperability: Fully compatible with all SEMI standard FOUPs. • Cleanliness: Better than Class 1 particle performance when integrated in Class 100 or better environment. • Reliability: Robust design combined with precision assembly achieves superior dependability and lifetime performance. • Zero Preventative Maintenance: Superior precision design requires no periodic lubrication or re-alignment. • Repeatability: Industry leading design utilizes DSP controlled electro-mechanical/pneumatic closed-loop servos for precise repeatable motion. • Wafer Mapping: High performance Break-The-Beam wafer mapping option allows fast, accurate wafer detection. • Fab Customization: Configurable features include programmable lights, buttons, carrier ID, and AMHS options. • Compliance*: SEMI, S2, S8, CE, and F47 compliant. • Bridge Tool: 200mm wafer operation (with insert @ 10mm pitch).

2. DS-01031ADO_0810.qxd 9/8/06 11:52 AM Page 2 ADO – Automatic Door OpenerTM 300mm FOUP Load Port for Automated Wafer Handling Specifications Wafer size/capacity Load height Height without carriage Width Depth Weight (with carriage) Noise level @ 1 m FOUP type FOUP sensors FOUP load to open time FOUP open to unload time FOUP clamping Docking motion Reproducibility Electronic unit Communications Utility Connections Electrical power supply 300 mm/25 900 mm, adjustable ±10 mm 1374 mm 470 mm 591.5 mm Approx. 75 kg <62 dB SEMI standard E47.1-0697 and E62 Placement and Present 6.90 sec., 7.95 sec. with mapper 5.95 sec., 7.75 sec. with mapper Active independent center lock 70 mm <0.1 mm Microcontroller, Flash Firmware up-loadable Serial, ASCII, 9 pin D-Sub ADO-S load port with through-beam wafer mapper Additional Key Features 96 watts max @ idle, 240 watts peak, 100-240VAC / 50-60 Hz standard, +24VDC optional Min. 60 psi, Max. 145 psi (relative) oil-free purified <5 µm <1 m3/h for 10 cycles/hour One-touch fitting for 1/4” tubing None required Better than Class 1 operation (when operating in Class 100 or better environment) • Carrier ID R/W at dock and undock Compressed air (input) Consumption Connection Vacuum Cleanliness • Twist and Pull FOUP door attach • Twist and Pull center lock FOUP clamp • Servo control/force feedback motion technology • FEOL and BEOL lockout pins • Five FOUP placement sensors Ambient Conditions Temperature Operation: +15 to +25°C (58 to 77°F) Transport: -25 to +55°C (-13 to 131°F) Operation: 10% to 95% rel. humidity Transport: 5% to 95% rel. humidity Operation: Class 100 or better on operator side Plywood case 1700 mm 700 mm 900 mm Approx. 50 kg • Programmable AMHS drop off position • Finger safe motion control safety circuit Humidity • Flash firmware up-loadable Cleanliness Shipping Crate Length Width Height Weight • Integrated self-test diagnostics • Configurable status lights Options • Mobility stand • Wafer mapper, Break-The-Beam type Specifications Compliance* E1.9 300 mm Cassette E15.1 300 mm Tool Load Port E47.1 300 mm Boxes and Pods E57 Kinematic Couplings E62 300 mm FIMS E63 BOLTS interface • Manual load/unload button/s E64 E-84 E-99 F47 S2/S8/S14 CE 300 mm Cart Docking AMHS Parallel I/O Interface CIDRW Electrical Voltage Sag Standard Safety Guidelines EMC, LVD, and MD Directives • Carrier ID R/W interface – RFID AdvanTag™, HERMOS™, Omron® – IRID SMART-Tag™ – Barcode • AMHS Single and Dual E84 PIO for OHT and AGV/RGV * Complies to applicable portion of industry standards with some intentional exceptions taken for improved performance and interoperability. Specifications are subject to change without notice. • Info pads sensors • Quartz wafer protrusion sensor • SWIF FOUP-For-One interface 510-620-0235 ext 718 or visit www.kensingtonlabs.com • 200mm Bridge Tool (with insert @ 10mm pitch) DS-01031 © 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners. • E-diagnostics with GUI