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Meet your 300mm Automation Partner

Kensington Laboratoriesu2019 is an advanced robotics technology leader committed to developing and manufacturing the highest<br>quality, most reliable and cost-effective atmospheric wafer handling robots in the industry. Our technical innovation along with investment in capital infrastructure ensures that our customers receive products with superior performance, high reliability, and low cost of ownership.<br>

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Meet your 300mm Automation Partner

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  1. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 1 Meet your 300mm automation partner. 510-620-0235 ext 718 or visit www.kensingtonlabs.com FM27207 © 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners. M-02025 2/03

  2. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 3 Kensington Laboratories’ is an advanced robotics technology leader committed to developing and manufacturing the highest PATENTED SELF-TEACH SYSTEM INTEGRATED TRANSMISSIVE OPTICAL SENSOR quality, most reliable and cost effective The advantage of our self-teaching system begins with its installation. An expert technician is required to teach other robotics systems, a time consuming process taking many hours, perhaps days. With its built in sensor, a Kensington robot is capable of “seeing” and measuring its environment and performing an automated self teach. An eye safe LED is integrated into the robot end effector and provides the robot with superior sensing capabilities. Allowing the robot to not only accurately map the location and presence of wafers in a cassette, but also to detect common errors, such as missing, doubled, or cross-slotted wafers. atmospheric wafer handling robots in the industry. Our technical innovation along with investment in capital infrastructure ensures Built in sensor technology, enables the robot to measure its environment, providing the robot with the wafer’s elevation and edge locations. The robot then precisely calculates the wafer’s center, allowing it to adjust automatically for any potential misalignment of the wafer before moving in to pick it up. that our customers receive products with In effect putting an automation expert inside the system itself, reducing the time required to bring the system online and providing for easy interchangeability of our robots. Possibly more important to your ultimate success, the self-teach feature also gives you the ability to rapidly and effectively scale your production and support capabilities. Advanced Robotics Technologies superior performance, high reliability, and low cost of ownership. PATENTED EDGE GRIP TECHNOLOGY Kensington Laboratories’ exclusive patented edge grip technology is a prime example of our technology leadership in automation systems. Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination. to particulate generation and improving your process yields. Which translates into reduced overall cost of ownership for your system. Our edge grip technology prevents wafer loss in situations of complete power or vacuum loss. Kensington Laboratories’ failsafe design maintains its grip on the wafer, even when the wafer is being held in an inverted or a vertical position. Our field proven edge grip technology enables our 300mm robots to provide true edge grip, virtually eliminating the potential for defects due FEATURES Patented Edge Grip Technology • Patented Automated Self-Teaching System • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options

  3. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 3 Kensington Laboratories’ is an advanced robotics technology leader committed to developing and manufacturing the highest PATENTED SELF-TEACH SYSTEM INTEGRATED TRANSMISSIVE OPTICAL SENSOR quality, most reliable and cost effective The advantage of our self-teaching system begins with its installation. An expert technician is required to teach other robotics systems, a time consuming process taking many hours, perhaps days. With its built in sensor, a Kensington robot is capable of “seeing” and measuring its environment and performing an automated self teach. An eye safe LED is integrated into the robot end effector and provides the robot with superior sensing capabilities. Allowing the robot to not only accurately map the location and presence of wafers in a cassette, but also to detect common errors, such as missing, doubled, or cross-slotted wafers. atmospheric wafer handling robots in the industry. Our technical innovation along with investment in capital infrastructure ensures Built in sensor technology, enables the robot to measure its environment, providing the robot with the wafer’s elevation and edge locations. The robot then precisely calculates the wafer’s center, allowing it to adjust automatically for any potential misalignment of the wafer before moving in to pick it up. that our customers receive products with In effect putting an automation expert inside the system itself, reducing the time required to bring the system online and providing for easy interchangeability of our robots. Possibly more important to your ultimate success, the self-teach feature also gives you the ability to rapidly and effectively scale your production and support capabilities. Advanced Robotics Technologies superior performance, high reliability, and low cost of ownership. PATENTED EDGE GRIP TECHNOLOGY Kensington Laboratories’ exclusive patented edge grip technology is a prime example of our technology leadership in automation systems. Other robots contact the wafer within the edge exclusion zone increasing the risk of failures caused by particle contamination. to particulate generation and improving your process yields. Which translates into reduced overall cost of ownership for your system. Our edge grip technology prevents wafer loss in situations of complete power or vacuum loss. Kensington Laboratories’ failsafe design maintains its grip on the wafer, even when the wafer is being held in an inverted or a vertical position. Our field proven edge grip technology enables our 300mm robots to provide true edge grip, virtually eliminating the potential for defects due FEATURES Patented Edge Grip Technology • Patented Automated Self-Teaching System • Integrated Transmissive Beam Wafer Mapping • Advanced Wafer Cassette Error Detection • Direct Drive Technology Continuous Rotation Capability • State-Of-The-Art Motion Control • Ca pable of Controlling Multiple Robots • Off Center Pick And Place Capability • Advanced Failsafe Wafer Handling Features Machine Tool Quality Construction • High Resolution Optical Encoders on All Axes • Reduced Wear Z Axis Counter Balance • Superior Linear Track Systems • Wet Robot Options

  4. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 5 Configurations and Options Robot Platforms REACH CONFIGURATIONS Our advanced Multi Link reach design utilizes a superior field-tested and proven Direct Drive system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing when an object is stuck and halting motion to prevent further damage. 3 link single arm 4 link single arm Robot Type Standard Reach1 single arm 14 or 21in. (355.6 or 533.4mm) dual arm 14in. (355.6mm) STANDARD ATMOSPHERIC ROBOT PLATFORMS Note: 1 without End Effector dual arm Kensington Laboratories’ atmospheric robots are designed to the most rigorous performance standards. Its machine tool quality construction and the meticulous selection of its long-life components contribute to our robots unsurpassed reliability and performance. Our modular design and patented self-teaching capability allow our robots to be used both in new systems and as a drop-in field replaceable unit (FRU) in existing systems. Our attention to detail and our focus on performance and reliability ensure our robots provide the highest throughput and lowest cost of ownership available. WORKING ENVELOPE Typical Swept Area1 System Type Without Wafer With 300mm Wafer single arm 18.34in. (465.8mm) 22.18in. (563.4mm) single arm w/wrist 24.48in. (621.8mm) 26.38in. (670.1mm) dual arm 20.17in. (512.3mm) 20.17in. (512.3mm) Note: 1 using a typical 300mm Edge Grip End Effector—varies with different end effector sizes and types single arm Our robots are designed to provide wafer handling operations within a very compact footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected. single arm robot dual arm robot Reach1 3 link 14in. (355.6mm) 14in. (355.6mm) single arm w/wrist Wafer Size 300mm (11.811in) 300mm (11.811in) dual arm End Effector3 Edge Grip Edge Grip Z TRAVEL OPTIONS Z Travel 14.25in. (362.0mm) 14.25in. (362.0mm) Height2 26.94in. (684.3mm) 30.25in. (768.4mm) Kensington robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of applied force. This reduces long-term wear and maintains a high degree of positional accuracy throughout the life of the robot. Diameter 9.75in. (247.7mm) 9.75in. (247.7mm) Weight4 < 85 lb (38.6kg) < 110 lb (49.9kg) single arm Cleanliness < Class 1 Control Interface RS-232 Connection (IEEE-488 Optional) Controller Model 4000 Payload Capacity Up to 8 lb Max (3.6kg) Input power 90 to 132 VAC at 47 to 63 Hz Vacuum requirement 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg) System Height2 Mounting types Wall Mount (Vertical) or Flange Mount (Horizontal) single arm Z Travel1 14in. Reach 21in. Reach MCBF5 10 Million 11.25in. 23.29in. (591.6mm) 24.94in. (633.5mm) MTTR < 2 hours 14.25in. 26.94in. (684.3mm) 27.94in. (709.7mm) dual arm Note: 1 without Edge Grip End Effector 2 measured from the bottom of the robot body to the bottom end effector mounting surface 3 Vacuum Grip optional 4 varies based on configuration options 5 minimum cycles, wafer moves, before failure, varies by application and environment 17.25in. 29.94in. (760.5mm) 30.94in. (785.9mm) Note: 1 includes High Speed Z and Braking Mechanism 2 measured from the bottom of the robot body to the bottom end effector mounting surface dual arm Actual specifications subject to change

  5. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 5 Configurations and Options Robot Platforms REACH CONFIGURATIONS Our advanced Multi Link reach design utilizes a superior field-tested and proven Direct Drive system that provides well-balanced and smooth motion. Unlike competitive systems, our robot requires minimal force to initiate movement giving it the capability of sensing when an object is stuck and halting motion to prevent further damage. 3 link single arm 4 link single arm Robot Type Standard Reach1 single arm 14 or 21in. (355.6 or 533.4mm) dual arm 14in. (355.6mm) STANDARD ATMOSPHERIC ROBOT PLATFORMS Note: 1 without End Effector dual arm Kensington Laboratories’ atmospheric robots are designed to the most rigorous performance standards. Its machine tool quality construction and the meticulous selection of its long-life components contribute to our robots unsurpassed reliability and performance. Our modular design and patented self-teaching capability allow our robots to be used both in new systems and as a drop-in field replaceable unit (FRU) in existing systems. Our attention to detail and our focus on performance and reliability ensure our robots provide the highest throughput and lowest cost of ownership available. WORKING ENVELOPE Typical Swept Area1 System Type Without Wafer With 300mm Wafer single arm 18.34in. (465.8mm) 22.18in. (563.4mm) single arm w/wrist 24.48in. (621.8mm) 26.38in. (670.1mm) dual arm 20.17in. (512.3mm) 20.17in. (512.3mm) Note: 1 using a typical 300mm Edge Grip End Effector—varies with different end effector sizes and types single arm Our robots are designed to provide wafer handling operations within a very compact footprint. The working envelope, or minimum swept area, is dependant on the type of robot, its reach, and the end effector selected. single arm robot dual arm robot Reach1 3 link 14in. (355.6mm) 14in. (355.6mm) single arm w/wrist Wafer Size 300mm (11.811in) 300mm (11.811in) dual arm End Effector3 Edge Grip Edge Grip Z TRAVEL OPTIONS Z Travel 14.25in. (362.0mm) 14.25in. (362.0mm) Height2 26.94in. (684.3mm) 30.25in. (768.4mm) Kensington robots utilize a proprietary vacuum counterbalancing system on the Z axis to allow rapid movement with a minimal amount of applied force. This reduces long-term wear and maintains a high degree of positional accuracy throughout the life of the robot. Diameter 9.75in. (247.7mm) 9.75in. (247.7mm) Weight4 < 85 lb (38.6kg) < 110 lb (49.9kg) single arm Cleanliness < Class 1 Control Interface RS-232 Connection (IEEE-488 Optional) Controller Model 4000 Payload Capacity Up to 8 lb Max (3.6kg) Input power 90 to 132 VAC at 47 to 63 Hz Vacuum requirement 10 Liters/Min at 635mm/Hg (21 SCFH at 25 inches/Hg) System Height2 Mounting types Wall Mount (Vertical) or Flange Mount (Horizontal) single arm Z Travel1 14in. Reach 21in. Reach MCBF5 10 Million 11.25in. 23.29in. (591.6mm) 24.94in. (633.5mm) MTTR < 2 hours 14.25in. 26.94in. (684.3mm) 27.94in. (709.7mm) dual arm Note: 1 without Edge Grip End Effector 2 measured from the bottom of the robot body to the bottom end effector mounting surface 3 Vacuum Grip optional 4 varies based on configuration options 5 minimum cycles, wafer moves, before failure, varies by application and environment 17.25in. 29.94in. (760.5mm) 30.94in. (785.9mm) Note: 1 includes High Speed Z and Braking Mechanism 2 measured from the bottom of the robot body to the bottom end effector mounting surface dual arm Actual specifications subject to change

  6. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 7 PREALIGNERS TRACK SYSTEMS Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features. Kensington Laboratories’ standard track solutions provide high acceleration and overall speed in a reliable and proven design. The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered systems. Our track systems can also be equipped with integrated alignment features that assure the locational accuracy of other critical automation elements of the system, such as 300mm pod doors and load ports. External Our external prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach. Unlike typical linear motor driven track systems that are incapable of sensing objects and can be extremely dangerous to both operators and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage. Track System Length Specifications/Features 26in. (660.4mm) 125in./s2, 2G's (3175.0mm/s2) Max 2 Station Track Acceleration Integrated 40.62in. (1031.8mm) 50in./s (1270.0mm/s) Max 3 Station Track Velocity The integrated prealigner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and prealigner system and maximizing cleanliness, accuracy, and reliability. 60.5in. (1536.7mm) 0.0001in. (0.003mm) 4 Station Track Accuracy Wafer Sizes 125mm 150mm 200mm and 300mm < 2 arc sec Rotational Accuracy < 0.002in (0.051mm) Centration Accuracy END EFFECTORS Wafer Sizes 125mm 150mm 200mm and 300mm < 2 arc sec Rotational Accuracy Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications. < 0.002in (0.051mm) Centration Accuracy Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements. Wafer Sizes 100mm 125mm 150mm 200mm and 300mm Edge Grip and Vacuum Grip Grip Types t r a n s m i s s i v e b e a m t e c h n o l o g y 300mm vacuum grip 300mm edge grip 200mm vacuum grip standard vacuum grip double SUPINATION Kensington Laboratories’ single arm robots can 340˚ Single Arm Robots be equipped with a supinating wrist for an n/a Dual Arm Robots additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or forked vacuum grip double inverted mode. standard vacuum grip forked vacuum grip

  7. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 7 PREALIGNERS TRACK SYSTEMS Both integrated and external prealigners use transmissive sensors located within the prealigner to sense the wafer’s edge and accurately measure location and orientation during a single rotation. They accurately detect any combination of SEMI standard wafer alignment features. Kensington Laboratories’ standard track solutions provide high acceleration and overall speed in a reliable and proven design. The track and robot are mounted vertically, eliminating errors and problems associated with conventional bottom mounted cantilevered systems. Our track systems can also be equipped with integrated alignment features that assure the locational accuracy of other critical automation elements of the system, such as 300mm pod doors and load ports. External Our external prealigner is designed to mount inside the front end of the tool. It provides high throughput, up to 450 wafers per hour, while maintaining cleanliness, accuracy, and reliability. It also allows our edge grip and transmissive sensor equipped robots to perform an automated one-step self teach. Unlike typical linear motor driven track systems that are incapable of sensing objects and can be extremely dangerous to both operators and the integrity of your tool; our track systems employ multiple safety mechanisms that can sense if the system has struck an object and automatically shut the system down to prevent or minimize damage. Track System Length Specifications/Features 26in. (660.4mm) 125in./s2, 2G's (3175.0mm/s2) Max 2 Station Track Acceleration Integrated 40.62in. (1031.8mm) 50in./s (1270.0mm/s) Max 3 Station Track Velocity The integrated prealigner is designed to mount on the shoulder of the robot, minimizing the footprint of the robot and prealigner system and maximizing cleanliness, accuracy, and reliability. 60.5in. (1536.7mm) 0.0001in. (0.003mm) 4 Station Track Accuracy Wafer Sizes 125mm 150mm 200mm and 300mm < 2 arc sec Rotational Accuracy < 0.002in (0.051mm) Centration Accuracy END EFFECTORS Wafer Sizes 125mm 150mm 200mm and 300mm < 2 arc sec Rotational Accuracy Our standard end effectors are constructed of Type III anodized aluminum, which is equivalent in hardness to sapphire. In addition to our patented edge grip end effectors, we also provide standard vacuum end effectors as well as designs for high-temperature and low backside contamination applications. < 0.002in (0.051mm) Centration Accuracy Our standard 300mm edge grip is designed with an integrated optical sensor to allow the robot to measure its environment and automatically perform a self-teach program. This is also available as an option for vacuum grip end effectors as well. If our standard end effectors do not meet your applications needs we can custom design one to precisely match your system’s requirements. Wafer Sizes 100mm 125mm 150mm 200mm and 300mm Edge Grip and Vacuum Grip Grip Types t r a n s m i s s i v e b e a m t e c h n o l o g y 300mm vacuum grip 300mm edge grip 200mm vacuum grip standard vacuum grip double SUPINATION Kensington Laboratories’ single arm robots can 340˚ Single Arm Robots be equipped with a supinating wrist for an n/a Dual Arm Robots additional rotational axis, allowing the robot to transfer the wafer to the tool in a vertical or forked vacuum grip double inverted mode. standard vacuum grip forked vacuum grip

  8. M-02025 Robot Brochure.qxd 8/31/06 3:25 PM Page 1 Meet your 300mm automation partner. 510-620-0235 ext 718 or visit www.kensingtonlabs.com FM27207 © 2006 Kensington Laboratories, LLC. All rights reserved. Automatic Door Opener is a trademark of Kensington Laboratories. The Kensington logo is a registered trademark of Kensington Laboratories. All other trademarks are property of their respective owners. M-02025 2/03

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