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EasyGem ™2.4 Technology Summary for SECS Communication

EasyGem ™2.4 Technology Summary for SECS Communication. Easy, Fast and Reliable Equipment FA Control Solution. Introduction. HOST. EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment

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EasyGem ™2.4 Technology Summary for SECS Communication

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  1. EasyGem™2.4Technology Summary for SECS Communication Easy, Fast and Reliable Equipment FA Control Solution

  2. Introduction HOST • EasyGem is based on Easycluster CTC. It supports control and status information between Host and Equipment • EasyGem supports SECS II Protocol, GEM Standards and HSMS Communication • EasyGem has proven reliability and flexibility through multiple OEM installs in different FAB environments. FAB Network GEM CTC PMC PMC I/F PMC PMC Machine TMC Intra-tool Network Easycluster

  3. Advantages • Easy to build : Defined using Configuration File or GUI • Easy to extend : GEM Definition options to change functionality. ( ex : 200mm <-> 300mm, Increased Modules ) • Easy to debug : Comprehensive history and communication data logfiles ( Host<->Gem, Gem<->Equip, Error, Debug Message file ) • High Reliability and Flexibility : Multiple OEM installs in varied End User facilities

  4. Features • 200mm/300mm FA Scenario Support : 200mm -> Gem Scenario, 300mm -> Gem and Control/Process Job Scenario • Full Gem Scenario Support : Up to Spooling, Trace, Variable Limit Set/Monitor, Material Movement • Max 64 Process Module Support : PPID, CEID • User ID Definition : Maximum 3000 : ID => SVID,CEID,ECID,RCMD,ALID • TEPAS Support : TEPAS( Samsung : Total Equipment Prediction Analysis System ) 1 TraceID has maximum 200 SVIDs, minimum 1sec sampling time and maximum 21 hundred million counts. At the same time 10 TraceID is supported • Variable and Flexible Option : User can configure Option as Fab Request and Equipment System,

  5. User Configuration Files • ALID.cfg : Alarm ID Registry File( link with Equipment Alarm Number ) • CEID.cfg : Collection Event ID Registry File( includes Kornic Provision Event ) • ECID.cfg : Equipment Constant ID Registry File( link with Equipment Parameter IO ) • SVID.cfg : Status Variable ID Registry File( link with Equipment Status IO ) • RCMD.cfg : Remote Command Registry File( includes Kornic Default Command ) • Recipe.cfg : Process Program ID Registry File( link with Process Module Recipe Item ) • System.cfg : EasyGem Option Configuration File

  6. Debugging Files • SECS Message Log File : All messages between Host and Equip. are saved. File is created at 1 hour intervals • Report/Event ID Log File : Can show ReportID/Event from host in GUI. The information remains persistent, no need to reload • Equipment Execution Log File : Command and Event messages between Gem and Equipment • Gem Analysis Error Log File : If message from host has an error( syntax, format, reject situation ), the analysis error message is saved. • Communication History and Error Log File : Ethernet Port Open Fail and Host Communication Start/End Time

  7. Architecture Configuration System CEID RCMD SVID PP Body ALID Log File Log File SECS2 Message Comm Debug Easycluster Analysis Debug Event Log PMC / TMC Spooling Data Easycluster IO Manager Application1 Alarm Manager Application2 EasyGem Event . . . . Communication Task Format CTC Execution Analysis Application1 Data gathering Unformat Application2 GUI GUI Alarm Manager IO Manager Host SECS2 Format UnFormat Task H/W

  8. System Requirements • Control System • Pentium III or Higher, min. 128 MB RAM • Monitor : SVGA (1,024 768) • LAN Card • OS : Window NT 4.0 Workstation, Windows 2000, Windows XP • FA Pre-test Tool : SECSim Pro™ (GW Associates, Ver2.0)

  9. Generic Equipment Model(GEM) • State Models : Process, Communication, Alarm, Control, Material Movement, Spooling • Establish Communications : Communication State Display in GUI, Timer Constants, Comm. Enable/Disable • Data Collection : Collection Event, Host Defined Event Reports, Event Enable/Disable, Status Data Collection, Trace Data Collection, Host Limit monitoring, Variable Name list Req. • Alarm Management : Set Alarm Enable/Disable/Auto/Semi, Alarm Reporting, Alarm Data Request • Remote Control : Control Event, Control Status Variable, State Display, Appropriately Accept/Deny • Equipment Constants : Non-Volatile Storage, Host Data Req. and New Data Set, EC Name List Request

  10. Generic Equipment Model(GEM) • Process Program Management : Host Upload/Download/Delete/Directory request, Process Program Verification • Material Movement : Port/Wafer Status, Completion Time • Equipment Terminal Services : Single/Multi Block, Message Display in GUI • Error Messages : Unrecognized Device ID/Stream/Function, illegal Data, Transaction Timeout • Clock : Equipment Clock Request/Set • Spooling : Non-Volatile Storage, Spool Status and Display

  11. Supported SEMI Standards • SEMI E5-0301SEMI Equipment Communications Standard 2 Message Content (SECS-II) • SEMI E30-1000Generic Model for Communications and Control of Manufacturing Equipment (GEM) • SEMI E37-0298High-Speed SECS Message Services (HSMS) Generic Services • SEMI E37.1-96EHigh-Speed SECS Message Services Single – Session Mode (HSMS-SS) • SEMI E39-0600Object Services Standard : Concepts, Behavior, and Services (OSS) • SEMI E40-0301Standard for Processing Management (PJM) • SEMI E42-0299ERecipe Management Standard: Concepts, Behavior, and Service(RMS) • SEMI E84-0301Specification for Enhanced Carrier Handoff Parallel I/O Interface(PIO) • SEMI E87-0301Provisional Specification for Carrier Management (CMS) • SEMI E90-0301Specification for Substrate Tracking(STS) • SEMI E94-1000Provisional Specification for Control Job Management(CJM) • SEMI E99-1000EThe Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

  12. Supported Stream & Function Msgs.

  13. Semi Standard Compliance GEM COMPLIANCE STATEMENT Fundamental GEM Requirements GEM Section Implemented GEM-Compliant State Models 3.0, 3.1, 3.3 Yes No Yes (See NOTE 1) No Equipment Processing States 3.4 Yes No Host-Initiated S1=F13/F14 Scenario 4.1.5.1 Yes No Event Notification 4.2.1.1 Yes No On-Line Identification 4.2.6 Yes No Error Message 4.9 Yes No Documentation 8.4 Yes No Control ( Operation Initiated) 4.12(except 4.12.5.2) Yes No Additional Capabilities  Implemented GEM-Compliant (See NOTE 2) Establish Communications 4.1, 3.2 Yes No Yes No Dynamic Event Report Configuration 4.2.1.2 Yes No Yes No Variable Data Collection 4.2.2 Yes No Yes No Trace Data Collection 4.2.3 Yes No Yes No Status Data Collection 4.2.5 Yes No Yes No Alarm Management 4.3 Yes No Yes No Remote Control 4.4 Yes No Yes No Equipment Constants 4.5 Yes No Yes No Process Program Management 4.6 Yes No Yes No Material Movement 4.7 Yes No Yes No Equipment Terminal Services 4.8 Yes No Yes No Clock 4.10 Yes No Yes No Limits Monitoring 4.2.4 Yes No Yes No Spooling 4.11 Yes No Yes No Control (Host-Initiated) 4.12.5.1 Yes No Yes No ( E5-0301/SEMI E30-1000/SEMI E39-0600 )

  14. Semi Standard Compliance PM COMPLIANCE STATEMENT Fundamental PM Requirements PM Section Implemented PM Compliant Single Process Job Execution 8.2  Yes No Yes No Process Job Milestones 8.2.1 (except 8.2.1.2, 3) Yes No Yes No Process Job Failure Indication 8.2.1.7 Yes No Yes No Abort Command 8.2.3.2 Yes No Yes No Process Job Object Implementation 8.3, 9 Yes No Yes No Reject Invalid/Incomplete Parameter 8.2.1.2.1 Yes No Yes No Reject Unsupported Capabilities 11.2 Yes No Yes No Services Implementation (not per Additional) 10 Yes No Yes  No Resource Pre/Post-conditioning Yes No Yes No Stop, Pause and Resume Commands 8.2.3.3, 4, 5 Yes No Yes No Manual Process Start 8.2.3.9 Yes No Yes No Process Job Queuing 8.3 Yes No Yes No Process Tuning 7.5, 10.4.9 Yes No Yes No Processing of Material Groups 7.6 Yes No Yes No Multiple Concurrent Process Jobs 7.7 Yes  No Yes No Multiple Consecutive Process Jobs 7.8 Yes No Yes No Process Job With No Material 7.9 Yes  No Yes No Event Notification 8.2.2 Yes No Yes No Enhanced Job Creation 10.4.2 Yes No Yes No Multiple Job Creation 10.4.3 Yes No Yes No Duplicate Job Creation 10.4.4 Yes No Yes No ( E40-0301 )

  15. Semi Standard Compliance CMS COMPLIANCE STATEMENT Fundamental CMS Requirements CMS Section Implemented CMS Compliant Load Port Number 9.1 ■Yes No ■Yes No Carrier Slot Number 9.2 ■Yes No ■Yes No Load Port Transfer State Model 9.3 – 9.4.3 ■Yes No ■Yes No Carrier Object Implementation 10 ■Yes No ■Yes No Load Port Reservation State Model (internal buffer equipment) 12 Yes ■No Yes ■No Load Port/Carrier Association State Model 13 ■Yes No ■Yes No Carrier ID Verification Support 14.2 ■Yes No ■Yes No Slot Map Verification Support 14.3 ■Yes No ■Yes No Services Implementation 16 ■Yes No Yes ■No Additional Events Implementation 18 ■Yes No Yes ■No Variable Data Definitions 19 ■Yes No Yes ■No Alarms Implementation 20 ■Yes No Yes ■No Additional CMS Capabilities CMS Section Implemented CMS Compliant Load Port Reservation State Model (fixed buffer equipment) 12 ■Yes No ■Yes No Reservation Visible Signal 12.2 ■Yes No ■Yes No ( E87-0301)

  16. Semi Standard Compliance STS COMPLIANCE STATEMENT Fundamental STS Requirements STS Section Implemented STS Compliant Substrate Tracking 8 (except 8.4) ■Yes No ■Yes No Substrate Object and State Model 9 ■Yes No ■Yes No Substrate Location Object and State Model 10 ■Yes No ■Yes No Service Message Implementation 11 ■Yes No ■Yes No Variable Data 12 ■Yes No ■Yes No Events 8.4 ■Yes No ■Yes No Fundamental STS Requirements STS Section Implemented STS Compliant none ( E90-0301)

  17. Semi Standard Compliance CJM COMPLIANCE STATEMENT Fundamental CJM Requirements CJM Section Implemented CJM Compliant Control Job Object 8 ■Yes No ■Yes No Control Job State Model 9 ■Yes No ■Yes No Control Job Queue Model 10 ■Yes No ■Yes No Carrier Properties 11 ■Yes No ■Yes No Service Message Implementation 12 ■Yes No ■Yes No Variable Data 13 ■Yes No Yes ■No Events 7.3.2 ■Yes No ■Yes No Additional Requirements 14 ■Yes No Yes ■No ( E94-1000 )

  18. Related Screens ( Gem Communication)

  19. Related Screens ( Gem Configuration)

  20. Related Screens ( Host Communication)

  21. Related Screens ( Job Manager)

  22. EasyGem Install Base

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