（ Transmission Electron Microscopy：TEM ）穿透式電子顯微鏡

（Transmission Electron Microscopy：TEM）穿透式電子顯微鏡 Advisor: Kuen-Hsien, Wu Student: Jyun-Li, Wu

Outline • Introduction • Principle • Application • Comparison • Conclusion • Reference

Introduction

Introduction 1924 Louis de Broglie 1926 Hans Busch 1931 Ernst Ruska 1939

Principle 規格：（1）電子源：熱陰極電子鎗（鎢絲或是 LaB6燈絲）（2）最大加速電壓：120KV（3）倍率：最低 50x，最高600,000x（4）傾斜角度：正負30度圖片來源: 南台科技大學

Principle Vacuum System ：To increase the mean free path of the electron gas interaction for the voltage difference between the cathode and the ground without generating an arc. Electromagnetic Lens System： A series of electromagnetic lenses and apertures are used to reduce the diameter of the source of electrons and to place a small, focused beam of electrons onto the specimen. Sample Holder ： TEM specimen stage designs include airlocks to allow for insertion of the specimen holder into the vacuum with minimal increase in pressure in other areas of the microscope. Imaging System ： Imaging methods in TEM utilize the information contained in the electron waves exiting from the sample to form an image.

Principle LaB6 λ ＝ h / p S＝0.61λ/NA 圖片來源： http://www.hk-phy.org/atomic_world/tem/tem02_e.html

Principle 圖片來源： http://www.hk-phy.org/atomic_world/tem/tem02_e.html

Principle Elastic Scattering Inelastic scattering Back-scattered Electron 圖片來源：http://www.microscopy.ethz.ch/elast.htm

Application Analysis of materialcontain : • Material morphology • Material defects • Chemical composition • Crystallographic structure • Extremely high resolution images

Application Polycrystalline silicon Epitaxy structure 圖片來源：http://el.mdu.edu.tw/datacos//09510221040A/%E7%A9%BF%E9%80%8F%E5%BC%8F%E9%9B%BB%E5%AD%90%E9%A1%AF%E5%BE%AE%E9%8F%A1TEM.pdf

Application Bright field image Dark field image 圖片來源：http://el.mdu.edu.tw/datacos//09510221040A/%E7%A9%BF%E9%80%8F%E5%BC%8F%E9%9B%BB%E5%AD%90%E9%A1%AF%E5%BE%AE%E9%8F%A1TEM.pdf

Application BFI of particle in Al-Cu alloy DFI selected to show the particle seen on their side DFI showing the conspicuous close to vertical particle 圖片來源：http://el.mdu.edu.tw/datacos//09510221040A/%E7%A9%BF%E9%80%8F%E5%BC%8F%E9%9B%BB%E5%AD%90%E9%A1%AF%E5%BE%AE%E9%8F%A1TEM.pdf

Application Three-dimensional image

Application 南台科技大學-奈米科技研究中心：JEOL JEM- 1230穿透式電子顯微鏡 (120 kV TEM)TEM影像分析 1000元/小時學校單位 1500元/小時研究單位 2000元/小時營利事業單位成功大學-微奈米科技研究中心：高解析場發射掃描穿透式電子顯微鏡 (High-Resolution Transmission Electron Microscopy ; HR-TEM) 680自行操作/小時 1800 代工學界/小時 3600 代工業界/小時

Comparison • TEM : • Samples must be conductive. • TEM sample need to prepare for thickness. • Using elastic scattering and inelastic scattering for image. • The resolution of TEM is 0.5 angstroms. • Specimen size must be under 3mm. • SEM : • Samples must be conductive. • Samples can not be a powder or a volatile items. • The scattered electrons in SEM are backscattered or secondary electrons. • SEM has only 0.4 nanometers. 圖片來源：http://highscope.ch.ntu.edu.tw/wordpress/?p=1599

Conclusion • Because of TEM analysis would be broken the sample, so we should consider what formation we can obtain in TEM, but TEM can provide high resolution better than SEM. • Both SEM and TEM are two types of electron microscopes and are tools to view and examine small samples.

Reference • http://investor.fei.com/ • http://highscope.ch.ntu.edu.tw/wordpress/?p=1599 • http://www.hk-phy.org/atomic_world/tem/tem02_c.html • http://news.gamme.com.tw/388598 • http://en.wikipedia.org/wiki/Transmission_electron_microscopy • http://homepage.ntu.edu.tw/~ntuipse/TEM.htm • http://www.microscopy.ethz.ch/elast.htm • http://www.differencebetween.net/science/difference-between-tem-and-sem/

Thanks for your attention

（ Transmission Electron Microscopy：TEM ）穿透式電子顯微鏡