ECE 5320 Mechatronics Assignment#01: Literature Survey on Actuators Topic: Piezomotors (Ultrasonic Motors)

1. Prepared by: Jared B. Bowler Dept. of Electrical and Computer Engineering Utah State University Email:jared.bowler@gmail.com; Phone: (435)797-6612; ECE 5320 MechatronicsAssignment#01: Literature Survey on Actuators Topic: Piezomotors (Ultrasonic Motors) 3/11/2005

2. Outline • Reference list • Links to explore this topic further • Basic working principles illustrated • Major applications • A typical configuration in application • Major specifications • Relevant issues in applications: advantages, disadvantages, how to select, cost information, and places to purchase. • Conclusion 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

3. Reference list • Mechatronics Handbook 20-57 to 60 • 1. Kenji Uchino. 1997. Piezoelectric Actuators and Ultrasonic Motors, Kluwer Academic Publishers • http://motion-controls.globalspec.com/LearnMore/Motion_Controls/Piezoelectric_Devices/ • http://www.sensorsmag.com/articles/1201/33/main.shtml • http://www.blackstone-ney.com/04.TP_mag_vs_piezo.php • http://www.edn.com/article/CA233737.html 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

4. For further exploration…. (Survival pointers of web references) • http://campus.umr.edu/piezo/ • http://www.sensorsmag.com/articles/1201/33/main.shtml • http://www.isso.uh.edu/publications/A2003/dabney.htm • http://www.edoceramic.com/Assemblies_Products/PEMot.htm • http://directory.google.com/Top/Science/Technology/Acoustics,_Ultrasound_and_Vibration/Ultrasound/Ultrasonic_Motors/ 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

5. Basic Working Theory:Piezoelectric Principles • Piezoelectric effect discovered by Pierre and Jacques Curie in 1880 • They discovered that under certain conditions such as when quartz is stressed along its main axis, the quartz will generate an electrical field • Now this effect is primarily used in sensing and actuating engineering applications 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

6. Classes of Piezoelectric Materials • Natural, such as quartz • Synthetic crystals • Polarized ferroelectric ceramics • Some Polymer films Piezoelectric Materials fall into 4 main categories 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

7. Classes of Piezoelectric Materials • Most engineering use polarized ferroelectric ceramics • Lead Zirconate Titanate (PZT) is most common • High performance and physical robustness are two main reasons for using the above material in engineering applications Piezoelectric Materials—Engineering 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

8. Basic Working Theory:Manufacture of Piezoelectric Materials “High electrical fields are used to polarize ceramic materials. Once domains are properly aligned, the piezoelectric material can do useful work.” “Piezoelectric material constants such as d33 are used to characterize crystal performance for a given applied voltage.” http://www.sensorsmag.com/articles/1201/33/main.shtml 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

9. Major applications of Piezoelectric Motors I • “Micropositioning stages • Manufacturing process control • Fiber-optic positioning • Pick-and-place assembly • Camera autofocus” http://www.sensorsmag.com/articles/1201/33/main.shtml 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

10. Major applications of Piezoelectric Motors II • “Medical catheter placement • Semiconductor test equipment • Computer disk drives • Robotic positioning • Pharmaceuticals handling” http://www.sensorsmag.com/articles/1201/33/main.shtml 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

11. Piezoelectric Motor Operation “Piezoelectric motors can be classified as standing wave (single vibration driving source) or propagating wave (two standing waves with a 90° phase difference in both time and space)” Kenji Uchino. 1997. Piezoelectric Actuators and Ultrasonic Motors, Kluwer Academic Publishers:269 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

12. Typical Configuration • “The EDO piezoelectric motor is designed for precision micropositioning applications. This low-profile (<0.20 in. high), low-inertia motor uses solid-state piezoelectric crystals for accurate, repeatable motion.The 130 kHz drive frequency provides speeds of 250 mm/s, with a 6 ms response time and a dynamic resolution of <1.0 micron over several inches. The force output to weight ratio is 14:1” (http://www.sensorsmag.com/articles/1201/33/main.shtml) 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

13. Operation • “In (A) the motor is at rest with pre-load. When a charge is applied, the element expands across its thickness (B). When the voltage goes negative, the element retracts, leaving a gap (C). The process is repeated 130,000 times/s (D)” (http://www.sensorsmag.com/articles/1201/33/main.shtml) 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

14. Example: Model PDA130 High Speed Piezoelectric Micro-positioning Motor. • Motor Speed (unloaded) …………………………200-300 mm/sec. • Motor Speed (100g load) ………………………..100-200 mm/sec. • Driving Force …………………………………….2.5 N Nominal • Operating Frequency …………………………….128 - 132 kHz • Linear Stroke …………………………………….20mm - 140mm • Time Required to Achieve Constant Speed ……...<8 msec. • Time Required to Achieve Complete Stop ………<4 msec. Major Specifications I 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

15. Example: Model PDA130 High Speed Piezoelectric Micro-positioning Motor. • Dynamic Resolution ……………………………........<1.0 micron • Power Supply ………………………………………...+24V, 250mA • Analog Speed Control Voltage ………………….....-10V, 0V, +10V • Total Assembly Weight PDA130 (Motor & Elec)…..85 grams • Micropositioning Motor only (PDM130) …………..18 grams Major Specifications II 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

16. Advantages of the Piezoelectric Motors • Large torque (to size) • Very high-resolution • Excellent controllability • Compact • Very Fast response • High efficiency • Silent Operation 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

17. Disadvantages of the Motors • Not as much output power as conventional motors • Need high voltage • Need high frequency power • Wear at the rotor stator contact point, which can require more servicing 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

18. Criteria for Selection • Energy efficiency • Piezoelectric material type • Electromagnetic coupling constant • Distortion / Charge Constant • Resolution • Speed • Cost 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

19. Cost information • Not many places sell directly to an end-user • Most businesses sell directly to another business and require special price quotes • Development is done on a per-project basis • Not a lot of “Do it yourself” applications-mostly integrated systems & educational uses • Can cost under $1 to hundreds depending on your requirements 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

20. Places to purchase • PI http://www.physikinstrumente.de/products/section7/piezo_motor_index.htm • EDO ECP http://www.edoceramic.com/ • Argillon GmbHhttp://www.piezo-products.com/ • Elliptec http://www.elliptec.com/ 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators

21. Conclusion • Although the piezoelectric effect is well known, it is difficult to find practical applications. However, if you are producing something that could take advantage of the motor's characteristics, it is well worth your time to contact some companies that deal in piezoelectric applications and request a quote. 03/10/05 ECE5320 Mechatronics. Assignment#1 Survey on actuators