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Using a Microplasma for Propulsion in Microdevices

Explore the use of microplasma for propulsion in microdevices, from plasma pump introduction to results and future research plans for MEMS plasma pump design and fabrication.

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Using a Microplasma for Propulsion in Microdevices

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  1. Using a Microplasma for Propulsion in Microdevices David Arndt Faculty Mentors: Professor John LaRue and Professor Richard Nelson IM-SURE 2006

  2. Outline • Plasma Pump Introduction • Project Goals • Background • Project Setup and Description • Results • Summary • Future Research Plans

  3. Airflow Kapton Tape Copper Electrodes Plasma Pump Introduction • Air is ionized to create a plasma. • Ions move in response to an electric field. • Impart force onto surrounding air molecules

  4. Project Goals • Create a working macro-scale plasma pump • Visualize flow • Evaluate effect of changing experiment parameters in order to optimize setup • Control electrodes independently in order to control flow direction and path. • Design and fabricate a MEMS device that implements a microplasma pump.

  5. Background • General Micropump Applications • Manipulating micro-particles and micro volume fluids. • Types of micropumps • Reciprocating: peristaltic pump • Continuous flow: electrophoresis pump • Plasma Micropump Applications • Manipulating gas-carried particles • Gas sensor • MEMS cooling

  6. Background • Inspiration for our Plasma Pump Research: “Using Plasma Actuators For Separation Control on High Angle of Attack Airfoils,” Martiqua L. Post et al.

  7. Project SetupTop View Diagram Electrodes High Voltage Plasma Generator DC Power Supply Glass Channel Kapton Tape Smoke Generator Power Supply Heating Element Digital Camera

  8. Project SetupChannel Models Large Channel 2.54 cm by 1.4 cm Small Channel: 2 mm by 2 mm

  9. ResultsVelocity Measurements

  10. ResultsVelocity Measurements No noticeable change in flow velocity with change in geometry.

  11. ResultsDielectric Experimentation • 2 mil Kapton tape • dielectric strength of 12000 volts. • 1 layer: minimum voltage enough to burn Kapton • 3 layers: works well, very little damage • 6 mil Cover glass: no noticeable damage • will be used in MEMS device.

  12. ResultsFlow Direction and Path • Used opposing electrode pairs to demonstrate control of flow direction in a 2 mm by 2 mm channel. • Independent electrode control.

  13. ResultsFlow Direction and Path • Control of Flow Path in a Bifurcating Channel

  14. Summary • Created macro-scale plasma pump and visualized air flow. • Evaluated the effect of electrode width, electrode overlap and dielectric material/thickness. • Demonstrated control of flow path and direction

  15. Future ResearchMEMS Plasma Pump Design and Fabrication • Overlapping electrodes • Slide cover glass as dielectric • Electrodes created by electron beam deposition and photolithographic patterning • Channel formed by patterning a clear silicone material • Introduce visualization smoke using a hypodermic needle or create internally

  16. Acknowledgements Project direction: Professors John LaRue and Richard Nelson Technical expertise and advice: Allen Kine and George Horansky Research Team: Eric Cheung, Michael Peng, and Patrick Nguyen Huu

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