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Introduction to Auger Electron Spectroscopy AES MATSE 305 ...

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Introduction to Auger Electron Spectroscopy AES MATSE 305 ...

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    1. Introduction to Auger Electron Spectroscopy (AES) MATSE 305 - November 23, 1998 Center for Microanalysis of Materials Frederick Seitz Materials Research Laboratory University of Illinois at Urbana-Champaign

    2. What is Auger?

    3. Why the Odd Name?

    4. Surface Sensitivity

    5. The Auger Process

    6. Auger Energy Scale

    7. AES Electron vs. X-ray Photon

    8. Auger Stats

    9. Auger Data Formats

    10. AES Can Identify Elements

    11. AES Sensitivity Factors

    12. Peak Height / Quantitation

    13. Additional Capabilities of Auger

    14. Why UHV for Surface Analysis?

    15. AES Instrument Configuration

    16. Significance of Primary Beam

    17. MRL Instrumentation

    18. Sputtering Samples

    19. Al/Pd/GaN Thin Film Example

    20. Al/Pd/GaN Profile Data

    21. Al/Pd/GaN Atomic Concentration Data

    22. Area Specific Depth Profile Example

    23. Summary of Surface Techniques

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