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Micromachined Planar Inductors on Silicon Wafers for MEMS Application

Micromachined Planar Inductors on Silicon Wafers for MEMS Application. George Burdell III School of Electrical and Computer Engineering Georgia Institute of Technology Atlanta, GA 30332-0250. Paper Summarized.

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Micromachined Planar Inductors on Silicon Wafers for MEMS Application

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  1. Micromachined Planar Inductors on Silicon Wafers for MEMS Application George Burdell III School of Electrical and Computer Engineering Georgia Institute of Technology Atlanta, GA 30332-0250

  2. Paper Summarized • C. H. Ahn, and M. G. Allen, “Micromachined planar inductors on silicon wafers for MEMS applications,” IEEE Trans. Industrial Electron., vol. 45, pp. 866-876, Dec. 1998.

  3. Application of Micromachined Inductors • Magnetic microactuators • Magnetic microsensors • Integrated switched DC/DC converters

  4. Desired Characteristics of Micromachined Inductors • High Q-factor ( high L, low R ) • High current-carrying capability • High magnetic saturation • Closed magnetic circuit • Low production cost • Ease of fabrication

  5. Geometries of Micromachined Inductors with Ni/Fe Core Spiral type Solenoid type Toroidal-meander type * The Pictures are taken from the paper summarized

  6. Photomicrograph of Fabricated Inductors Spiral type Toroidal-meander type Solenoid type * The Pictures are taken from the paper summarized

  7. Electrical Performance Comparison of Fabricated Inductors Equivalent circuit of the inductors Electrical parameters of the fabricated inductors * The picture and the table are taken from the paper summarized

  8. Conclusion • Design and fabrication of three different types of integrated micromachined inductors with Ni/Fe cores • Comparison of electrical parameters

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