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Prepared by: Kenneth Reese Dept. of Electrical and Computer Engineering Utah State University

ECE5320 Mechatronics Assignment#01: Literature Survey on Sensors and Actuators Topic: Interferometer Sensor. Prepared by: Kenneth Reese Dept. of Electrical and Computer Engineering Utah State University E:kbr@cc.usu.edu; T: ( 435)797-8276; F: (435)797-3054 (ECE) W: http://www.ece.usu.edu.

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Prepared by: Kenneth Reese Dept. of Electrical and Computer Engineering Utah State University

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  1. ECE5320 MechatronicsAssignment#01: Literature Survey on Sensors and Actuators Topic: Interferometer Sensor Prepared by: Kenneth Reese Dept. of Electrical and Computer Engineering Utah State University E:kbr@cc.usu.edu; T: (435)797-8276; F: (435)797-3054 (ECE) W: http://www.ece.usu.edu 3/11/2005

  2. Outline • Reference list • To probe further • Major applications • Basic working principle illustrated • Classic example • 3 Modern examples ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  3. Outline (continued) • Advantages • Limitations • Cost information • Where to Buy • How to Choose • Calibration ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  4. Reference list • http://en.wikipedia.org/wiki/Interferometer • K. M. Lynch and M. A. Peshkin, The Mechatronics Handbook, chapter 19, section 19.1, pp. 12, CRC Press LLC, 2002 • http://fy.chalmers.se/~tomasz/limi/limifoto.htm • Davidson University Physics Dept. • Univ. of Michigan Physics Dept. • www.spaceandmotion.com • www.canon.com/technology/detail/device/laser_encoder/ • www.photonics.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  5. To explore further • http://en.wikipedia.org/wiki/Interferometer • http://www.phy.davidson.edu/StuHome/jimn/Final/Pages/FinalAparatus.htm • http://planetquest.jpl.nasa.gov/Keck/keck_index.html • http://www.eso.org/projects/vlti/ • http://physics.rug.ac.be/ fysica/applets/EM.htm • http://www.physics.lsa.umich.edu/nea/ • www.photonics.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  6. Major applications • Interferometer telescopes • radio arrays • optical arrays • Integrated optical circuits • Mach-Zehnder interferometers • Optical switching • Optical calibration and testing courtesy of http://fy.chalmers.se/~tomasz/limi/limifoto.htm ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  7. Major applications (continued) • Wavefront measurement • RF modulators • Precision machine calibration • Position sensor in mechatronic systems • Measure incremental linear motion courtesy of Davidson University Physics Dept. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  8. Basic Working Principle I • Works on the principle that EM waves interact constructively or destructively • Send light energy (usually from a laser) on two different paths • One path is reflected to detector, the other reflected from the target to be measured. Target Michelson interferometer, Courtesy of Wikipedia.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  9. Basic Working Principle II • The two beams add constructively or destructively creating a series of light and dark edges. • As the target moves, the pattern repeats by increments of the wavelength of the laser. courtesy of Univ. of Michigan Physics Dept. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  10. Interference fringe pattern(wait for the movie to start in the box below) ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  11. Classic ExampleMichelson-Morley Experiment • Experiment to investigate luminiferous aether • Michelson used a gas discharge lamp, a filter, and a pinhole to make a coherent monochromatic light since no laser was available. • Expected changes in the fringes of the interference pattern due to aether drag • No expected changes occurred • Disproved the existence of aether Expected Detected courtesy of www.spaceandmotion.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  12. Modern Example ICanon Micro Laser Interferometer • Used in hard disk drive development • Detects and measures unintended surface and shaft movement of the hard disc • Uses a semiconductor laser • Allows for greater density disks courtesy of www.canon.com/technology/detail/device/laser_encoder/ ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  13. Modern Example IIVery Large Telescope Interferometer • The larger the telescope, the better the resolution • The constructive interference from several telescopes spread out can produce a picture with resolution similar to a single telescope with the diameter of the combined spread. • Located at the European Southern Observatory ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  14. Modern Example IIIMach-Zehnder interferometer • Integrated optical circuits • Two branches of a waveguide are externally modulated • Fiber optic interferometer varies their relative phase courtesy of www.photonics.com ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  15. Advantages • Very high resolution • Capable of measuring in the nm region • Large range of measurements • Typically up to a meter • Multiplexing advantage • Interferometers view all wavelengths of light ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  16. Limitations • Bulky • Expensive • Require large set up time • Very sensitive to mechanical misalignment and vibration ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  17. Cost Information • Many different varieties of interferometers at a wide range of prices. • Since interferometers are generally specialized products, prices are higher than other sensors. • Cost of interferometers is most influenced by the quality of the light source (laser) used. Typically in the range $7,500-$25,000 • Many interferometers are custom built for a specific application. The cost of producing these can easily reach the $100,000 range. ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  18. Where to Buy • Engineering Synthesis Design, Inc. • Intellium (Intelligent Optical Meterology Solutions) • www.engsynthesis.com • Zygo • www.zygo.com • Ambios Technology • www.ambiosTech.com • 4D Technology • www.4Dtechnology.com • Note: These are not your typical Radio Shack items! ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  19. Items to consider Sensitivity Resolution Accuracy Precision Bandwidth Response time SNR Cost System integration Complexity Interface compatibility with legacy hardware Ease of use RF interference with other system components How to Choose an Interferometer ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  20. Calibration • Interferometer calibration should be performed periodically to adjust for aging, wear, and other degrading effects • Failure to calibrate increases margin of error • Erroneous interferometer readings could be disasterous in a mechatronic system • Using the interferometer, measure a known distance and adjust accordingly ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

  21. Questions ECE5320 Mechatronics. Assignment#1 Survey on sensors and actuators

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