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Simulation Program for Microsystems Model functions extensible by user

SUGAR 2.0 beta. KSJ Pister, J Demmel KP15. JV Clark, N Zhou, D Bindel. Project description. Simulation Program for Microsystems Model functions extensible by user Parameterized netlist and subnets Genetic Algorithms Adaptive Modeling Millennium Web Service. Recent results.

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Simulation Program for Microsystems Model functions extensible by user

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  1. SUGAR 2.0 beta KSJ Pister, J Demmel KP15 JV Clark, N Zhou, D Bindel Project description • Simulation Program for Microsystems • Model functions extensible by user • Parameterized netlist and subnets • Genetic Algorithms • Adaptive Modeling • Millennium Web Service Recent results Needle piercing pig skin Work next 6 months

  2. Transient Analysis of Pull-In Smooth ramp V(t) = 0V to 20V. Pulls in at about 2/3 of gap. Stepped ramp V(t) = 11V to 15V. Nonlinear oscillation before pull-in.

  3. Subnets used for serpentines La,b w=1.8u SUGAR 3032Hz FEA 3032Hz Experimental 2697Hz * * * No damping was used in FEA and SUGAR simulations.

  4. Serpentine Parameterization Level curves of serpentine stiffness Dependence on DL & Dw K=0.0013N/m Within 1.2% of experimental Measured by Fedder DL K=0.0146N/m K=0.27N/m Dw

  5. w DY gap T=150C T=600C Heatuator Optimization This geometry was given by B. Allen [Hilton Head ‘98]. SUGAR comes within 0.5% of experimental. However, this geometry can be optimized for maximum deflection with SUGAR.

  6. Heatuator Optimization Deflection dependence on Dgap & Dw DY Within 0.5% error Measured by B. Allen et al. Dw Dgap

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