1 / 9

COSMOS Co mponents and S mart Machines with M icro-Nan o Surface Embedded S ensors

COSMOS Co mponents and S mart Machines with M icro-Nan o Surface Embedded S ensors. The Vision. Improved interaction between human and machines. Smart machines with imbedded sensors will improve safety, lifetime and performance .

luka
Download Presentation

COSMOS Co mponents and S mart Machines with M icro-Nan o Surface Embedded S ensors

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. COSMOS Components and Smart Machines with Micro-Nano Surface Embedded Sensors

  2. The Vision • Improved interaction between human and machines. • Smart machines with imbedded sensors will improve safety, lifetime and performance. • Short periods with improper operation with critical parameters may be avoided. • Create intelligent surfaces of the future.

  3. The Goal Develop a sensor embedded into a strong, self lubricating, diamond like carbon (DLC) coating. CVD DLC CCr-CrN layer Embedded Sensor Substrate

  4. Cross-disciplinary task Sensor design and technology 3D structurization Sensor test Surface embedded sensors Coating test Interface: Wiring and electronics DLC coating technology

  5. The Team • Acreo • Peter Leisner • Sintef, • N. Peter Østbø • Danish Technological Institute • Lars Pleth Nielsen • VTT • Helena Ronkainen

  6. Danish Technological Institute (DTI) Responsible: Centre Manager, M.Sc., Ph.D. Lars Pleth Nielsen Contribution: • Plasma-enhanced Si3N4 as a potential electric insulator • Wear-resistant PVD/CVD coatings • Ion beam accelerator for metal doping of DLC • Thermocouple based on e.g. copper/constantan • Testing of sensors and coatings

  7. Acreo AB, Sweden Responsible: Manager, Ph.D. Peter Leisner Contribution: • 3D-micro structuring • Sensor design • Wiring and electronic connectors to sensor unit • Interface to the surrounding

  8. Sintef/MiNaLAB, Norway Responsible: Research Scientist, Ph.D. (Dr. ing.) N. Peter Østbø Contribution: • Know-how and capability within piezoelectric thin films • Plasma-enhanced Si3N4 (restricted to compatible substrates) • ALD coatings (advanced oxides, nitrides etc.) • 2D-3D micro structuring • Sensor design • Materials and chemistry (polymers, wear-resistant coatings)

  9. VTT Technical Research Centre of Finland Responsible: Senior Research Scientist, Dr. (Tech.) Helena Ronkainen Contribution: • Sensor design • Wear-resistant coatings: Diamond like carbon coatings • Integration of piezoelectric material (e.g. AlN) with patterned MEMS structures • Integration of electronics • Tribological test of sensor structures

More Related