다이아몬드상 카본필름

1. 다이아몬드상 카본필름 한국과학기술연구원 이 광 렬

2. 탄소, Carbon, 炭素 다이아몬드 흑연 석탄, 숯

3. Carbon Atomic Bond Structure

5. What is DLC ? • Amorphous Solid Carbon Film • Mixture of sp1, sp2 and sp3 Hybridized Bonds • High Content of Hydrogen (20-60%) • Synonyms • Diamond-like Carbon • (Hydrogenated) amorphous carbon (a-C:H) • i-Carbon • Tetrahedral Amorphous Carbon

6. sp3 TAC:H TAC DAC PAC GAC No film H sp2

7. a-C:H ta-C

8. Properties of Solid Carbon

9. Structure and Mechanical Properties • Hardness • 3-D interlink of the atomic bond network • Residual Stress • Distortion of bond angle and length • Both are dependent on the degree of 3-D interlinks. 2-D Analogy of the Structure

10. Electronic Structure • p state has strong tendency of clustering. • Two phase model was suggested • p bonded clusters : Electric properties • sp3 Interlinks : Mechanical properties • Electronic structure depends mainly on p states, because the states are located near Fermi level. • Eg (optical gap) depends on the degree of clustering of the p state.

11. Electrical Properties • Conduction Mechanism • Discontinuous hopping between localized states distributed in the mobility gap either near a conduction band edge or near Fermi energy. (Hopping Mechanism) • Mixture of Crystalline and Amorphous Phases • Mixture in Conduction Mechanism

12. Structure and Electrical Properties • Graphitic bonds  localized conduction state • Overlap of the localized state  metallic conduction • Higher hydrogen  higher resistivity • By reducing dangling bond, i.e. localized conduction state

13. Historical Survey • 1972 • Aisenberg and Chabot : Arc Ion Beam • 1979 • Holland and Ohja : PACVD • 1984 • Mori and Namba : Ion Plating • 1986 • Savvides : Sputtering • 1992 • Collins et al : Laser Ablation • Filtered Vacuum Arc

14. 1000 Dense Hydro- Carbon Dense Carbon 100 Impact Energy (eV) Polymer Like Carbon 10 Amorphous Carbon (sp2) 1 Plasma Polymers Carbon Source Hydrocarbon Source Deposition Methods Ion Source Energy Cold Substrate

15. Energy Dependence of DLC

16. Ion Energy Distribution PACVD

17. Examples of Deposition Methods

18. Examples of Deposition Methods

19. 합성방법의 특징

20. Properties of Solid Carbon

21. Advantages of DLC Films • Low Deposition Temperature (R.T. – 200oC) • No limitation of Substrate Materials • Smooth Surface • Roughness : few nm • Wide Range of Physical Properties • Tunability of the Properties • Uniform Large Area Deposition • High Productivity and Low Cost

22. AFM Image of DLC coated Si

23. Advantages of DLC Films • Low Deposition Temperature (R.T. – 200oC) • No limitation of Substrate Materials • Smooth Surface • Roughness : few nm • Wide Range of Physical Properties • Tunability of the Properties • Uniform Large Area Deposition • High Productivity and Low Cost

24. Properties of Solid Carbon

25. IR Transmittance of DLC Coated Ge Windows

26. Advantages of DLC Films • Low Deposition Temperature (R.T. – 200oC) • No limitation of Substrate Materials • Smooth Surface • Roughness : few nm • Wide Range of Physical Properties • Tunability of the Properties • Uniform Large Area Deposition • High Productivity and Low Cost

27. Courtesy of J&L Tech. Ltd

28. Problems of DLC Films • Thermal Instability • Degradation at High Temperature (400 – 600oC) • High Residual Compressive Stress • Max. 10 GPa • Poor Adhesion • Stable Chemical Bonds • Especially on Ferrous Materials

29. Structure and Mechanical Properties • Hardness • 3-D interlink of the atomic bond network • Residual Stress • Distortion of bond angle and length • Both are dependent on the degree of 3-D interlinks. 2-D Analogy of the Structure

30. Self Delamination Failure during Tribotest

31. DLC 필름의 특성과 응용 구 분 특 성 응 용 2,000 - 8,000Hv (cf. Diamond 10,000Hv) 비철금속 가공용 공구, 정밀금형의 표면경화코팅 High hardness 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 마찰계수 0.05 - 0.2 (cf. Stainless Steel : 0.6 - 0.7) Low friction and high wear resist. 산 또는 알카리와 반응치 않는다 Chemical Inertness 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING 특히 적외선 영역의 높은 광투과도 Optical Transmittance IR WINDOW, SCANNER WINDOW의 표면보호 코팅

32. 경질박막의 내마모 윤활특성 마모도 마찰계수. DLC WC TiN CrN TiCN 2.0 1.6 1.2 0.8 0.4 (상대비교치) 0.2 0.4 0.6 0.8 1.0

34. DLC 필름의 특성과 응용 구 분 특 성 응 용 2,000 - 8,000Hv (cf. Diamond 10,000Hv) 비철금속 가공용 공구, 정밀금형의 표면경화코팅 High hardness 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 마찰계수 0.05 - 0.2 (cf. Stainless Steel : 0.6 - 0.7) Low friction and high wear resist. 산 또는 알카리와 반응치 않는다 Chemical Inertness 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING 특히 적외선 영역의 높은 광투과도 Optical Transmittance IR WINDOW, SCANNER WINDOW의 표면보호 코팅

36. DLC 필름의 특성과 응용 구 분 특 성 응 용 2,000 - 8,000Hv (cf. Diamond 10,000Hv) 비철금속 가공용 공구, 정밀금형의 표면경화코팅 High hardness 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 마찰계수 0.05 - 0.2 (cf. Stainless Steel : 0.6 - 0.7) Low friction and high wear resist. 산 또는 알카리와 반응치 않는다 Chemical Inertness 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING 특히 적외선 영역의 높은 광투과도 Optical Transmittance IR WINDOW, SCANNER WINDOW의 표면보호 코팅

37. Video Cassette Recorder

38. DLC코팅 VTR헤드드럼 Courtesy of Daewoo Electronics Co.

39. DLC Coated Digital VCR Tape

40. HDD용 Hard Disk

41. DLC coated Head Slider

42. DLC 필름의 특성과 응용 구 분 특 성 응 용 2,000 - 8,000Hv (cf. Diamond 10,000Hv) 비철금속 가공용 공구, 정밀금형의 표면경화코팅 High hardness 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 마찰계수 0.05 - 0.2 (cf. Stainless Steel : 0.6 - 0.7) Low friction and high wear resist. 산 또는 알카리와 반응치 않는다 Chemical Inertness 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING 특히 적외선 영역의 높은 광투과도 Optical Transmittance IR WINDOW, SCANNER WINDOW의 표면보호 코팅

43. Schematic of Diesel Engine

44. Results of Wear Test under Dry Lubrication Conditions

45. Result of Dynamo Test (900h) Hard Cr Coated Ring DLC coated Ring Before Test Before Test After Test After test

46. Hard Cr Coated Piston Ring DLC/Cr Coated Piston Ring 6.5mm 100mm Before Test Before Test 5.3mm After Test After Test

47. Sliding Tools for Electron Gun • Grids (2) manipulate the electron beam. • Sliding Tools is used to make spacing between the grids (Tolerance is about 4mm) • Smooth grid surface and parallel positioning are important.

48. DLC Coated Sliding Tools • Low friction • Long life time • Electrical insulation • No corrosion on the shelves Courtesy of J&L Tech. Co., Ltd.

49. DLC 필름의 특성과 응용 구 분 특 성 응 용 2,000 - 8,000Hv (cf. Diamond 10,000Hv) 비철금속 가공용 공구, 정밀금형의 표면경화코팅 High hardness 치구, GEAR, SURGICAL BLADE, HARD DISK등의 고체 윤활 코팅 마찰계수 0.05 - 0.2 (cf. Stainless Steel : 0.6 - 0.7) Low friction and high wear resist. 산 또는 알카리와 반응치 않는다 Chemical Inertness 부식 방지막, 인체삽입물의 BIO-COMPATIBLE COATING 특히 적외선 영역의 높은 광투과도 Optical Transmittance IR WINDOW, SCANNER WINDOW의 표면보호 코팅

50. IC Packaging