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Introduction

Explore the various pumps, valves, gauges, and seals used in vacuum technology, including UHV pumps, sputter-ion pumps, NEG pumps, and titanium sublimation pumps. Learn about different vacuum connections, flanges, and temperature control requirements. Find out about the importance of vacuum gauges and valves in synchrotron light sources.

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Introduction

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Presentation Transcript

  1. Vacuum Technology Introduction Pumps Valves Gauges Seals

  2. UHV Pumps • Capture pumps are the dominating pumps for vacuum systems for synchrotron light sources • Titanium is the most common getter • sputter-ion pumps use chemical and ionization pumping effects

  3. Sputter Ion Pumps Sputter Ion Pumps

  4. Sputter Ion Pumps • At SLS storage ring we use standard diode pumps with Varian Dual controllers • Typically 8 pumps share the same pump controller • All pump controllers run in STEP VOLTAGE mode

  5. electron channel NEG Strips NEG Pumps NEG Strips • APS 5 mm Undulator chamber • ST 707 NEG strips • 350-450°C activation temperature • High pumping speed and pumping capacity for noble gases Courtesy of E. Trakhtenberg NEG Cartridges • Getter material Zr-V-Fe and Ti – V • Very compact with high pumping speed and capacity • Flange size DN 40, 100, 150 CF Courtesy SAES Getters

  6. Titanium Sublimation Pumps Ti-filament periodically heated with high currents. Ti evaporates and generates a getter film on the chamber wall or cooled screen. Progressive saturation and reduction of pumping speed with time. Ti-Filament Chamber wall

  7. Valves • All metal valves are used for vacuum systems of synchrotron light sources • RF shielded sector gate valves • All metal angle valves for the connection of roughing pumps • All metal gate valves for beamline frontends

  8. Valves SLS Sector Vacuum Scheme

  9. Vacuum Gauges • Total pressure gauges for synchrotron light sources • Total pressure measurement • Sensor for vacuum interlock • Cold cathode gauges (IMG) are mainly used for total pressure measurement • At SLS we use active gauges with on board electronics • Pirani gauges • RGA

  10. UHV flanges All Metal Flanges Connections Flat Seal-Flange (ASP, CLS, SLS) Temperature control is required CF-Flange with RF-Bridge (BESSY II) CF-Flange with Small gap (ESRF, ANKA)

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