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Investigation of optical properties of Cubic AlN with hexagonal phase inclusion . Pirayu kallayanalarp, MPN Chang-Chun Wu, MPN. Objective. Investigation of optical properties of Cubic AlN with hexagonal phase inclusion . Why is aluminum nitride?. Energy gap 6.2 eV
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Investigation of optical properties of Cubic AlNwith hexagonal phase inclusion Pirayu kallayanalarp, MPN Chang-Chun Wu, MPN
Objective • Investigation of optical properties of Cubic AlN with hexagonal phase inclusion Why is aluminum nitride? • Energy gap 6.2 eV • Excited LED (200 nm-300 nm) • Eliminate bacteria with UV
Structure of AlN c-AlN h-AlN
Technics • Investigate surface • Nano-structure can be observed by using scanning electron microscopy (SEM) • UV spectrophotometer • To find refractive index (n) • Investigate element and amount • Energy dispersion X-ray (EDX)
Samples • Phase parity 60% (cubic AlN 60%) AlN~ 350 nm • 3 Samples • Very high hexagonal AlN • Very high cubic AlN c-GaN~ 200 nm LT c-GaN~ 7 nm c-AlN~ 350 nm MgO c-GaN~ 7 nm h-AlN (1-102) ~ 100 nm MgO MgO (001)
x1000 x10000 Results from SEM x50000
Energy Dispersion x-ray (EDX) Very high hexagonal AlN 3mm 3mm
Very high cubic AlN 3mm 10 mm
Phase parity 60% (cubic AlN 60%) 20 mm 6mm
UV Very high hexagonal AlN and Very high cubic AlN and use Swanepoel method Very high hexagonal AlN Very high cubic AlN
Cauchy dispersion relation Refractive index where
Fitting equation to find a,b with Cauchy relation Very high hexagonal AlN Very high cubic AlN