1 / 9

Focused Ion Beam Milling Study on Au-Coated SiN Membrane

This study conducted on January 21, 2004, involved FIB milling of 600nm Au on 200nm SiN, exploring various hole and terrace milling parameters in different row configurations. From r=500nm circles in Row A to r=250nm circles in Row B, detailed front and backside milling processes were performed, highlighting specific parameters such as hole milling time and current. SEM and FIB images captured during the experiments provide a comprehensive overview of the milling results on the membrane, aiding in analyzing the structural modifications induced by the FIB process.

mcclay
Download Presentation

Focused Ion Beam Milling Study on Au-Coated SiN Membrane

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. A1 A1 A2 A2 A3 A3 A4 A4 B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Focused Ion Beam January 21, 2004 C13 with 600nm of Au on 200nm SiN membrane • Row A • r=500nm circles • A1 hole milled 120sec at 10pA • A2,A3,A4 terrace 40sec at 10pA • Row B • r=250nm circles • B1 hole milled 30sec at 10pA • B2,B3,B4,B5 terrace 10 sec at 10pA Backside (600nm gold deposited into pit) Frontside (Milled surface)

  2. A2 Front • A2_1 • R=50nm T= 60sec I=2pA • A2_2 • R=50nm T= 30sec I=2pA • A2_3 • R=50nm T= 15sec I=2pA Back Front A2_3 A2_1 A2_1 A2_3 A2_2 A2_2

  3. A3 • A3_1 • R=50nm T= 120sec I=1pA • A3_2 • R=50nm T= 60sec I=1pA • A3_3 • R=50nm T= 15sec I=1pA Front Back Front A3_3 A3_1 A3_1 A3_3 A3_2 A3_2

  4. A4 Front • A4_1 • R=20nm T= 120sec I=1pA • A4_2 • R=20nm T= 10sec I=1pA • A4_3 • R=20nm T= 20sec I=1pA • A4_4 • R=20nm T= 5sec I=1pA Front A4_1 Back A4_3 A4_4 A4_2 A4_1 A4_3 A4_2

  5. B2 Front • B1_1 • R=20nm T= 30sec I=1pA • B2_2 • R=20nm T= 20sec I=1pA • B2_3 • R=20nm T= 10sec I=1pA • B2_4 • R=20nm T= 5 sec I=1pA • B2_5 • R=20nm T= 1sec I=1pA B2_1 Front Back B2_5 B2_3 B2_2 B2_4 B2_1 B2_3 B2_2

  6. B3 Front Front • B3_1 • R=10nm T= 5sec I=1pA • B3_2 • R=10nm T= 5sec+5secs I=1pA • B3_3 • R=10nm T= 1.5sec I=1pA • B3_4 • R=10nm T= 1 sec I=1pA Back Front B3_4 B3_2 ?? B3_1 B3_3 B3_2

  7. SEM pictures Front FIB pictures Summary of all images and filenames for C13 on January 21, 2004

  8. A4_2

  9. B2_3

More Related