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Micro-Via Drilling on Metal with Laser Pulses. Choose a right laserLaser energy couplingThermal Process simulationMaterial removalPlasma/plume generation and its effects on laser processingFactors affecting the via qualityUltra-fast laser process. Choose A Right Laser . Long history of drill
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1. Micro-Via Drilling on Metal with Laser Pulses Dr. Yunlong Sun
Corporate Fellow
Dir. of Photonics R & D
Electro Scientific Industries, Inc.
2. Micro-Via Drilling on Metal with Laser Pulses Choose a right laser
Laser energy coupling
Thermal Process simulation
Material removal
Plasma/plume generation and its effects on laser processing
Factors affecting the via quality
Ultra-fast laser process
3. Choose A Right Laser
5. Choose A Right Laser
7. Choose A Right Laser
8. Beam Spot Size
9. Metal Absorption vs. Wavelength
10. UV Laser Via Formation
11. Laser Energy Coupling
12. Laser Energy Coupling
13. Laser Process Simulation
14. Thermal Process Simulation
15. Thermal Process Simulation
16. Thermal Process Simulation
17. Thermal Process Simulation
18. Thermal Process Simulation
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26. Factors Affecting Via Quality
27. Factors Affecting Via Quality
28. Factors Affecting Via Quality
29. Factors Affecting Via Quality
30. Factors Affecting Via Quality
31. Factors Affecting Via Quality
32. Factors Affecting Via Quality
33. Via Drilling with Ultra-Fast Laser
34. Via Drilling with Doubled Ultra-Fast Laser (400 nm)
35. Via Drilling with Doubled Ultra-Fast Laser (400 nm)
36. References/Questions