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  35. Some samples need two bevels. WHY is that? A shallow bevel angle to detail the shallow structures at the surface and a steep bevel to reach the maximum depth of interest. • page 35 of 46

  36. Some samples need two bevels. Can’t you just use a smaller step and detail the surface? Two microns (horizontal displacement) is about the smallest step we can make without stepping into the damage crater of the previous measurement. • page 36 of 46

  37. Some samples need two bevels. Can’t you just produce a real long bevel? The longer the bevel, the more risk of scratches. We would prefer keeping the bevel length under a 1000um but we will make it longer if necessary – again with the risk of unacceptable scratches. • page 37 of 46

  38. The following is a case of a bipolar structure that needed two bevels • page 38 of 46

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  42. Auto-Doping Problems during EPI Deposition • page 42 of 46

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