1 / 7

Semiconductor Device Modeling and Characterization – EE5342 Lecture 30 – Spring 2011

Semiconductor Device Modeling and Characterization – EE5342 Lecture 30 – Spring 2011. Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc/. Ideal 2-terminal MOS capacitor/diode. conducting gate, area = LW. V gate. -x ox. SiO 2. 0. y. 0. L. silicon substrate. t sub.

mitch
Download Presentation

Semiconductor Device Modeling and Characterization – EE5342 Lecture 30 – Spring 2011

An Image/Link below is provided (as is) to download presentation Download Policy: Content on the Website is provided to you AS IS for your information and personal use and may not be sold / licensed / shared on other websites without getting consent from its author. Content is provided to you AS IS for your information and personal use only. Download presentation by click this link. While downloading, if for some reason you are not able to download a presentation, the publisher may have deleted the file from their server. During download, if you can't get a presentation, the file might be deleted by the publisher.

E N D

Presentation Transcript

  1. Semiconductor Device Modeling and Characterization – EE5342 Lecture 30 – Spring 2011 Professor Ronald L. Carter ronc@uta.edu http://www.uta.edu/ronc/

  2. Ideal 2-terminalMOS capacitor/diode conducting gate, area = LW Vgate -xox SiO2 0 y 0 L silicon substrate tsub Vsub x

  3. Band models (approx. scale) metal silicon dioxide p-type s/c Eo Eo qcox ~ 0.95 eV Eo qcSi= 4.05eV qfm= 4.1 eV for Al Ec qfs,p Eg,ox ~ 8 eV Ec EFm EFi EFp Ev Ev

  4. Flat band condition (approx. scale) Al SiO2 p-Si q(fm-cox)= 3.15 eV q(cox-cSi)=3.1eV Ec,Ox qffp= 3.95eV EFm Ec Eg,ox~8eV EFi EFp Ev Ev

  5. Equivalent circuitfor Flat-Band • Surface effect analogous to the extr Debye length = LD,extr = [eVt/(qNa)]1/2 • Debye cap, C’D,extr = eSi/LD,extr • Oxide cap, C’Ox = eOx/xOx • Net C is the series comb C’Ox C’D,extr

  6. Accumulation forVgate< VFB Vgate< VFB -xox SiO2 EOx,x<0 0 holes p-type Si tsub Vsub = 0 x

  7. References * Semiconductor Physics & Devices, by Donald A. Neamen, Irwin, Chicago, 1997. **Device Electronics for Integrated Circuits, 2nd ed., by Richard S. Muller and Theodore I. Kamins, John Wiley and Sons, New York, 1986

More Related