Welcome to Nanofabrication Laboratory at MC2

1. Welcome to Nanofabrication Laboratory at MC2 Clean Room Introduction and safety course

2. 10:15 Introduction • MC2 cleanroom facility • Cleanroom design and layout • 11.15 Administrative guidelines • Cleanroom behaviour • DVD-Cleanroom behaviour (15 min) • Cleanroom access • LIMS • Process tools/driving license • Working hours/lab buddy/ visitors • 12:00 Lunch break • 13:15 Work Environment and Safety gear • Risks with chemicals (Kaija Matikainen) • Categories of chemicals (acids, bases, solvents, photochemicals) • Handling of chemical waste (Svante Pålsson) • 14:15 Safety first • Safety policy at MC2 and Chalmers • DVD- Cleanroom safety (25 min) • Alarm systems • 15:30 Lab tour (Ulf Södervall) Clean Room Introduction and safety course

3. MC2 Building • Inauguration: Year 2000 • Measurements Lab- & Office Area: 18 000 m2 • Cleanroom operation starts: Year 2001 • Process Lab Area: 1 240 m2 • Cleanroom Class: 1 - 1 000 • Investment: 90 M€ Clean Room Introduction and safety course

4. The Aim of this course; To inform about the regulations and rules regarding safety and work environment associated with work in the MC2 Nanofabrication laboratories. Safety declaration Safety regulations, procedures and potential dangers 14:50 reak Clean Room Introduction and safety course

5. The Aim of this course; Anyone who violates the safety regulations, or in any way Exposes himself/herself or others to danger Will be denied accesss to the laboratory by the decision of the executive management Clean Room Introduction and safety course

6. Registration document & Questionnaire Clean Room Introduction and safety course

7. Clean Room Introduction and safety course

8. Working in a Cleanroom environment Sources of contamination Cleanroom garments Cleanroom behaviour Training in the gowning procedure Clean Room Introduction and safety course

9. MC2 NanoFabrication laboratory • Cleanrooms often found in processing industry • electronics, pharmaceutical, biopharmaceutical, medical device industries, food and critical manufacturing environments (semiconductor, biology) and hospitals. • The only way to control contamination is to control the total environment. Air flow rates and direction, pressurization Temperature Humidity and specialized filtration Clean Room Introduction and safety course

10. MC2 NanoFabrication laboratory • A cleanroom is laboratory with acontrolled environment, where products are manufactured. A room in which the concentration of airborne particles is controlled, and which is constructed and used in a manner to minimize the introduction, generation and retention of particles inside the room and in which the other relevant parameters e.g. temperature, humidity and pressure are controlled as neccessary (ISO 14644-1) • Typical office building contains ca 1 million particles/foot3. The Federal standard 209E (ISO 14644) is a document that establishes standard classes of air cleanliness for airborne particulate levels in cleanrooms Clean Room Introduction and safety course

11. Origin of contamination • Personal 35% • Process equipment 25% • Process 20% • Chemicals 20% Clean Room Introduction and safety course

12. Clean Room Introduction and safety course

13. Classification of particle sizes Clean Room Introduction and safety course

14. The cleanroom garments • Filtering function • Low penetration for particles>0,3my.The garments should be worn properly sealed • Wear resistant • Strong material, wear, laundry resistant • ESD (Electro Static Discharge) safe • Conductive fibres in the hood, cleanroom suit and boots including the sole • Comfort • Breathing material and comfortable fit • Size • Choose the correct size. Too tight garments cause friction and increase particle generation. Too large garments may cause the ”air balloon effect” resulting in excessive release of particles Clean Room Introduction and safety course

15. Contamination from personal • particles of >0,5 my diam. generated/minute from the human body Action Ordinary clothes Clean room clothes Sitting 500,000 15,000 Standing up 2,500,000 80,000 Walking slowly 5,000,000 150,000 Running 10,000,000 300,000 Clean Room Introduction and safety course

16. Clean Room Introduction and safety course

17. Cleanroom areas in the Nanofabrication laboratory • Processlab 1 (cleanroom- class 100/10) • Processlab 2: (”The training lab”- class 1,000) • MBE-lab (class 10,000) • Dicing and CMP room (class 100,000) • Chemical preparation room ( class 1,000) • Visitors corridor, (class 10,000) • air-locks and gowning rooms (class 100,000) • Other areas: • Media basement (below process lab 1) • Machine hall;Fans, pressurised air, central vacuum,CVC,Water purification • pump service and UHV preparation room • Media attic(above process lab 1, 2) • Scrubber room • Steamer room • House E: House gases, Nitrogen purifier, Neutralisation plant, waste tanks, Emergancy power facility • House G: Special gases Clean Room Introduction and safety course

18. ”Fan tower” HEPA filter Plenum Media basement MC2 Cleanroom ventilation system, PL1 Clean Room Introduction and safety course

19. Technical Data; Process laboratory 1 • 360 000m3/h of air is circulated (c:a 500 HEPA) • 90% of the air is recirculated, 10% is evacuated • Temperature= 21 C +/- 1 C • Relative humidity=43% +/- 5% • Air Velocity= 0.4 m/s • Noise level specification=53 dB • Vibration level=BBN-E Clean Room Introduction and safety course

20. Cleanliness & Climate Control • Particles: • Class 10-100 • Clothing: • Full body suits to limit particle generation • Ventilation: • 520 000 m3/hour capacity • Climate control: • Humidity control within ± 3% RH, • Temperature control within ± 1°C (± 0,1°C around e-beam column) Clean Room Introduction and safety course

21. Vibration Minimization • Cleanroom has independent support from rest of building • Multiple layers of vibration insulated pillars • 3 µm/sec (curve E) is met with good margins • Vibration sensitive equipment not in contact with cleanroom floor • Roughing pumps located on media level Clean Room Introduction and safety course

22. Cleanroom functions and Media • Static electricity and ESD • General media • House gases • Special gases • Drain • Ventilatiojn exhaust (solvent, Acid, Toxic) • Electrical power • DI water • CDA, Vacuum, LN2 Clean Room Introduction and safety course

23. Clean Room Introduction and safety course

24. Entry and Exit to CleanroomOn and Off garment procedure Clean Room Introduction and safety course

25. Cleanroom rulesTo consider before entering the Cleanroom • A proper personal hygiene is a condition for working in the cleanroom • Persons suffering from a cold or eczema should not enter the cleanroom • Cosmetics, rings and wristwatches have to be removed before entering the gowning area • Persons wearing glasses must clean those before entering the gowning area • Mobile phones are not allowed in the cleanroom areas • Men with a beard have to use a beard cover • Smokers should wait at least 10 minutes after smoking before entering the cleanrrom • Smokers and snuff users have to rinse their mouth before entering the cleanroom Clean Room Introduction and safety course

26. Cleanroom rulesTo consider in the cleanroom • All movements should be slow and well planned • Avoid crowding as this concentrates the contamination • Do not carry items close to your body • Do not touch your face or garment with your clean gloves • Avoid touching any clean surfaces; such as load locks, etc • Avoid talking while near your component/product • No food (including chewing gum) or beverages are allowed in the cleanroom. Only ”cleanroom compatible matters/materials” are allowed. • Garments that are wet or stained have substantially reduced filtering effect and have to be exchanged immediately Clean Room Introduction and safety course

27. DVD- Cleanroom behaviour • Contamination and people • Human microenvironment • Speed of movement • Carrying materials • Correct working behaviour Clean Room Introduction and safety course

28. MC2 ; Administrative guidelines Design dictated by • Cleanliness • Vibration minimization • Safety • Support access • Professional lab staff of 14 engineers specialized in • Lithography and Nano Processing • Thin Film and Plasma Processing • Thermal and Chemical Processing and 6 technicians working with • Service & Maintenance Clean Room Introduction and safety course

29. Machine Park • >170 Tools • Silicon processing up to 150mm • Extensive III-V and wide bandgap processing • Extensive nano-processing capabilities Clean Room Introduction and safety course

30. Nanofabrication Laboratory Clean Room Introduction and safety course

31. Nanofabrication laboratory organisation • Lab Manager; Peter Modh • Process specialists • Johan Andersson • Bengt Nilsson • Piotr Jedrasik • John Halonen • Karin Hedsten • Göran Alestig • Mahdad Sadeghi • Mats Hagberg • Henrik Frederiksen • Ulf Södervall • Martin Hollerz • Göran Pettersson _ Zonghe Lai • Service and Maintenance • Svante Pålsson • Göran Reivall • Lars-Åke Sidengren • Christer Andersson • Kaija Matikainen • Fredrik Johansson • Emmy Nilsson Clean Room Introduction and safety course

32. Cleanroom introduction course • Compulsory for all cleanroom users • Over 600 participants so far • Safety • Rules & regulations • Proper cleanroom behavior • “Driving licence”-training • To use any equipment in the cleanroom it is compulsory to have the relevant training before using it . • Ph D Processing course • For graduate students in applicable programs • Theoretical background and demonstrations of a wide variety of micro/nano processing techniques • Course for Masters students Clean Room Introduction and safety course

33. MC2 Equipment booking systemLIMS- Laboratory Information Management System http://labbokning.mc2.chalmers.se/ Clean Room Introduction and safety course

34. MC2 Equipment booking systemLIMS- Laboratory Information Management System http://labbokning.mc2.chalmers.se/ Log in! Clean Room Introduction and safety course

35. MC2 Equipment booking systemLIMS- Laboratory Information Management System Clean Room Introduction and safety course

36. MC2 Equipment booking systemLIMS- Laboratory Information Management System http://labbokning.mc2.chalmers.se/ Clean Room Introduction and safety course

37. Consider the following when you book equipment • Plan your process steps. Do not book more time than you need. • Make sure that your process step is finished by 18.00, unless you have a backup( see ”lab buddy” system) • Cancel booked time that you do not intend to use. • In case somebody do not show up at the booked hour, another user can take the time after 30 min. • Apply a professional attitude to your work, and keep your booked time strictly. Delays will cause irritation among the subsequent users. • Make sure that you have booked sufficient time for cleanup and resetting the equipment to original state. Clean Room Introduction and safety course

38. Lab usage • Only authorized users may use the process equipment in the lab. You need a ”drivers licence” forALL tools (including microscopes, wet benches) • How to acquire an equipment drivers license?? • The purpose of the drivers license is to make sure that the user is able to handle the tool in a manner that is • Safe for the user, • Safe for the tool itself • Safe for the process running at the tool. Clean Room Introduction and safety course

39. The following outline should be applied for complex tools: • Find someone in your group who is already experienced with the tool, and work with him/her until you are both satisfied with your basic handling of the tool. • Once both you and your teacher agree that you are able to work independently with the tool, your teacher should contact the tool responsible and state that you are trained well enough for independent work. Please note that you are under no circumstances allowed to actually work with the tool without supervision without a license. Your teacher must be present at all times during training. • The tool responsible person will give the training needed, and you will be granted the ”driving license” Clean Room Introduction and safety course

40. Opening hours • Approved users have access to the process laboratories 24 hours a day, all year, with the exeption of certain holidays. When the lab is closed, an announcment is always displayed at http://processlab.mc2.chalmers.se/information/information.html BUT! If you want to use the process laboratory late at night or at other times outside normal working hours (08.00-18.00) you need to use the back-up or lab buddy system Also; new users will automatically only have access during office hours. Clean Room Introduction and safety course

41. Back-up system; ”lab-buddy” ”if there is any risk of accidental personal injury occuring while working alone, then the worker must be assured quick access to help in case of an emergency” When you use the ”lab-buddy” system it is required that • Another approved user is present in the lab (or close by) to assist you in the event of an accident/emergency • Lab-buddies have close contact (not by mobile-telephone) for the system to work efficiently • The backup person must be an experienced lab user, familiar with the process lab and its safety devices and alarm system. (ArbetsMiljöLagen ,AML, 3 Chp ; 2§ paragraph) https://www.chalmers.se/insidan/SV/om-chalmers/arbetsmiljo/halsa-ohalsa-olycksfall/ensamarbete Clean Room Introduction and safety course

42. User responsiblities; MC2 assumes that every user • Has read and understood the lab-safety manual • Has attended the training course given by MC2 for new users • Carefully follows the MC2 rules and regulations for cleanroom work • Does not lend or copy keys or card-keys for the MC2 facility • Follows the directives given from the MC2 staff • Maintains a proper personal hygiene • Acknowledges the established work and access hours • Pays attention to the information updates issued by MC2 • Acts in a professional manner • Register his/her emailadress to the MC2 introduction course manager Users with experience from smaller process laboratories may see the MC2 regulation framwork as complex and over-worked. However, both the size and cleanliness level of the facility calls for rigorous safety rules and cleanroom discipline. In the end, it is the user who benefits from a safe and functional working place Clean Room Introduction and safety course

43. Lab staff responsibilities The MC2 facility staff has the following functions and responsibilities • To give advice and suggestions regarding process issues • Execute projects according to process plans • Ensure that safety,cleanliness and equipment standards are maintained • Perform service and maintenance • Maintain booking systems and other administrative functions connected to the lab • Train new users in cleanroom behaviour and dress code • Inform users via email about changes related to the process lab Please note that it is NOT within the responsibility of the lab group staff to • Clean the equipment after other users • Execute process steps or tasks without approval from the project manager Clean Room Introduction and safety course

44. Lab usage- Storage • Every user will be assigned a personal storage space with a corresponding storage box • Intended for temporary storage of work material such as tweezers, ”personal items”, cleanroom pens and notebooks, etc • Only ”harmless” materials may be stored in the personal storage boxes • Personal storage boxes are personal. You should not borrow items from a box that belongs to someone else. • Materials with high probability of contamination or which may impose a safety risk, may under no circumstances be stored in the personal storage boxes. Clean Room Introduction and safety course

45. Lab usage- Visitors • Every user have the possibility to bring a visitor in the laboratory only with the following restrictions • Visitors corridor: You may bring visitors without special permission. Visitors muct be accompanied all the time and must be properly gowned (cleanroom coat and hair cover). No bags, mobil phones, coats are allowed • Process lab 1 -requires special permission from the lab manager. All guests must be informed about safety rules and cleanroom behaviour • Process lab 2. Normally not accessable for visitors. Guests must be accompanied all the time. Make sure that your guests are gowned properly and instruct them not to touch anything. • MBE lab, CMP and chemical preparation room- Normally not accessable for visitors. You need permission from the lab staff if you want to bring visitors here.. Clean Room Introduction and safety course

46. Lab usage • It is the responsibility of the user to clean and reset the process equipment after use • A user can be banned from the cleanroom, or be ordered further cleanroom training, if persistent or serios errors in the work procedure are observed Clean Room Introduction and safety course

47. Clean Room Introduction and safety course

48. Work environment risks(Kaija Matikainen) Clean Room Introduction and safety course

49. The objective of this chemical safety training course is to identify potentially hazardous chemicals, and to establish safety routines for work in the lab. Clean Room Introduction and safety course

50. Hazardous Chemicals at MC2 Nanofabrication Laboratories • Acids • Bases • Oxidizers • Solvents Clean Room Introduction and safety course