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CS Product Development

CS Product Development. Mega-Jet Cleaning for 4x3.5 Timic QFN. CS Product Team Oct, 2007. Contents. Introduction Mega-Jet cleaning setup Mega-Jet cleaning results Cleaning results Observations Suspected units Preliminary conclusions / discussions. Introduction.

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CS Product Development

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  1. CS Product Development Mega-Jet Cleaning for 4x3.5 Timic QFN CS Product Team Oct, 2007

  2. Contents • Introduction • Mega-Jet cleaning setup • Mega-Jet cleaning results • Cleaning results • Observations • Suspected units • Preliminary conclusions / discussions

  3. Introduction • Mega-jet cleaning for Timic QFN 4x3.5 is conducted to evaluate the cleaning capability of the newly developed mega-jet cleaning system • Mega-jet cleaning is applied to clean every single 4x3.5 unit (groove is available at mode side). Optical microscope inspection is conducted for every cleaned unit. • Equipment • Mega-jet cleaning unit • Timic 4x3.5 QFN unit with groove at mode side • Water flow-meter • DC Power supply

  4. Water nozzle I.D. ø4mm Mega-Jet cleaning unit PZT traducer 1.8MHz Mega-Jet Cleaning Setup Testing setup and conditions

  5. Mega-Jet Cleaning Setup • Sample for cleaning • Photo detector integrated circuit (PDIC) ATMEL ATR0874 • 4x3.5 QFN unit with 1x1mm groove at the mode side centre Mold side surface Lead side surface 12 photo diodes at package centre

  6. Sample 1 Sample 2 Before Cleaning Before Cleaning Mega-Jet Cleaned Mega-Jet Cleaned 20x Magnifications 80x Magnifications 20x Magnifications 80x Magnifications Mega-Jet Cleaning Results • 142 units were washed by Mega-Jet, optical microscope inspected with 128 perfectly cleaned units were obtained.

  7. Sample 3 Sample 4 Before Cleaning Before Cleaning Mega-Jet Cleaned Mega-Jet Cleaned 20x Magnifications 80x Magnifications 20x Magnifications 80x Magnifications Mega-Jet Cleaning Results

  8. Sample 5 Sample 6 Before Cleaning Before Cleaning Mega-Jet Cleaned Mega-Jet Cleaned 20x Magnifications 80x Magnifications 20x Magnifications 80x Magnifications Mega-Jet Cleaning Results

  9. Mega-Jet Cleaning Results • Observations • No water marks remained on the cleaned units • 128 out of 142 clean units were obtained by using Mega-Jet cleaning apparatus • There is no marks observed on the photo diodes regions for those 128 units by optical microscope inspection • Marks were found on 14 out of 142 washed units. Further inspection with higher magnification inspection were carried out, results is shown in the following parts. Mega-Jet

  10. Suspected Units • Units with marks on the photo diode region were taken out • Higher power magnification optical microscope inspection for the suspected units were carried out 50x Mag. 200x Mag. 500x Mag. Sample 1 It is expected that the marks are not containments or foreign particles, because image focused deep into the photo diode surface plane by 20 ~ 30 μm. 1000x Mag.

  11. 50x Mag. 200x Mag. 500x Mag. 1000x Mag. Sample 3 50x Mag. 200x Mag. 500x Mag. 1000x Mag. Suspected Units Similar marks conditions as the previous sample Sample 2

  12. Sample 4 50x Mag. 200x Mag. 500x Mag. 500x Mag. 500x Mag. Serious defects found on this particular unit 1000x Mag. Suspected Units Marks is also focused deep into the photo diode surface plane by 20 ~ 30 μm.

  13. Preliminary Conclusion / Discussions • Mega-Jet cleaning for 144 Timic 4x3.5 QFN units with photo diode at 1x1mm pocket was carried out • 128 out of 142 clean units were obtained at 1LPM 3 seconds Mega-Jet washing • Microscope inspection on every single washed unit, no water marks remained on the units and clear photo diode region on the washed surface for those 128 units was observed Moreover, • 14 more suspected units were taken out for further microscopic inspection as marks on the photo diode regions were found • Higher magnification power up to 1000 times were carried out • Marks on 14 units were focused into the photo diodes surface plane by about 20 ~ 30 μm deep • Marks found on the photo diode region were suspected as defects of that particular unit • Besides, there are 13 more unwashed samples were kept for further inspection

  14. END

  15. Sample 5 500x Mag. 50x Mag. 200x Mag. 1000x Mag. Sample 6 500x Mag. 50x Mag. 200x Mag. 1000x Mag. Appendix • Further examined samples for the suspected units

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