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tilt angle Da

Importance of alignment precision. Example:. Error in local u.coord due to tilt Da. tilt angle Da. D u~u tan q Da. q. u. D u = 10 m m q = 45 o u = 5 cm implies: Da = 0.2 mrad = required angular precision. tilted wafer, strips normal to slide.

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tilt angle Da

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  1. Importance of alignment precision Example: Error in local u.coord due to tilt Da tilt angle Da Du~u tanq Da q u Du = 10 mm q = 45o u = 5 cm implies: Da = 0.2 mrad = required angular precision tilted wafer, strips normal to slide NordUGrid, Helsinki May 23-24, 2002

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